首页> 外文会议>Advances in X-ray analysis (ICDD2001) >CHARACTERIZATION OF NANOMETER LAYERED STRUCTURES USING MULTIPLE WAVELENGTH X-RAY REFLECTOMETRY AND SIMULATED ANNEALING DATA ANALYSIS
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CHARACTERIZATION OF NANOMETER LAYERED STRUCTURES USING MULTIPLE WAVELENGTH X-RAY REFLECTOMETRY AND SIMULATED ANNEALING DATA ANALYSIS

机译:多波长X射线反射光谱法和模拟退火数据分析表征纳米层状结构

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摘要

The characterization of multilayer structures having individual layer thicknesses in the nanometer range is a non-trivial task due to the large number of parameters involved. To address this problem, hard X-ray grazing-incidence specular reflectivity measurements and data modeling were performed. However, strong correlations between parameters (e.g. thickness and density, roughness and density) were observed due to insufficient amount of information present in the experimental data. To circumvent this difficulty measurements were performed at various energies selected from the wide spectrum of a synchrotron X-ray source. The fitting procedure used a Markovian probabilistic optimization algorithm, known as simulated annealing, and a solution was searched for the ensemble of experimental data collected. Results obtained from measurements performed at X-ray energies of 12 keV, 15keV, and 16 keV on an Ir/Al_2O_3 multilayer demonstrate the capabilities and present limitations of the method.
机译:由于涉及大量参数,表征具有纳米范围内的单个层厚度的多层结构是一项不平凡的任务。为了解决这个问题,进行了硬X射线掠入射镜面反射率测量和数据建模。然而,由于实验数据中存在的信息量不足,因此观察到参数之间的强相关性(例如厚度和密度,粗糙度和密度)。为了避免这种困难,在从同步加速器X射线源的宽光谱中选择的各种能量下进行测量。拟合过程使用了称为模拟退火的马尔可夫概率优化算法,并在解决方案中搜索了收集的实验数据的集合。通过在Ir / Al_2O_3多层膜上以12 keV,15keV和16 keV的X射线能量进行测量获得的结果证明了该方法的功能和当前的局限性。

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  • 来源
  • 会议地点 Steamboat Springs CO(US);Steamboat Springs CO(US);Steamboat Springs CO(US)
  • 作者单位

    European Synchrotron Radiation Facility, BP 220, 38043 Grenoble Cedex, France;

    rnEuropean Synchrotron Radiation Facility, BP 220, 38043 Grenoble Cedex, France;

    rnEuropean Synchrotron Radiation Facility, BP 220, 38043 Grenoble Cedex, France;

    rnEuropean Synchrotron Radiation Facility, BP 220, 38043 Grenoble Cedex, France;

    rnEuropean Synchrotron Radiation Facility, BP 220, 38043 Grenoble Cedex, France;

  • 会议组织
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 X射线、紫外线、红外线;
  • 关键词

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