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首页> 外文会议>Advances in X-ray/EUV optics and components VII. >A soft x-ray beam-splitting multilayer optic for the NASA GEMS Bragg Reflection Polarimeter
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A soft x-ray beam-splitting multilayer optic for the NASA GEMS Bragg Reflection Polarimeter

机译：用于NASA GEMS布拉格反射偏振仪的软X射线分束多层光学器件

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A soft X-ray, beam-splitting, multilayer optic has been developed for the Bragg Reflection Polarimeter on the NASA Gravity and Extreme Magnetism Small Explorer Mission (GEMS). The optic is designed to reflect 0.5 keV X-rays through a 90 degree angle to the BRP detector, and transmit 2-10 keV X-rays to the primary polarimeter. A transmission requirement prevents the use of a thick substrate, so a 2 µm thick polyimide membrane was used. Atomic force microscopy has shown the membrane to possess high spatial frequency roughness less than 0.2 nm rms, permitting adequate X-ray reflectance. A multilayer thin film was especially developed with reflectance and transmission properties that satisfy the BRP requirements and with near-zero stress. Multilayer depositions for prototype reflectors have been performed via magnetron sputtering. Reflectivity and transmission measurements closely match theoretical predictions, both before and after rigorous environmental testing.© (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
机译：已经为NASA重力和超强磁力小型探索者任务（GEMS）上的布拉格反射偏振仪开发了软X射线分束多层光学器件。该光学器件设计为通过90度角将0.5 keV X射线反射到BRP检测器，并将2-10 keV X射线透射到主偏振计。透射要求阻止了使用厚基板，因此使用了2 µm厚的聚酰亚胺膜。原子力显微镜已显示该膜具有小于0.2 nm rms的高空间频率粗糙度，从而具有足够的X射线反射率。专门开发了一种具有满足BRP要求和接近零应力的反射率和透射特性的多层薄膜。原型反射器的多层沉积已通过磁控溅射进行。在严格的环境测试之前和之后，反射率和透射率的测量结果都与理论预测非常吻合。©（2012）COPYRIGHT光电仪器工程师协会（SPIE）。摘要的下载仅允许个人使用。

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