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首页> 外文会议>Advances technology to support end user mission >MEMS COMES OF AGE - REVIEW OF A NEW BROADBAND 20 KHZ MEMS ACCELEROMETER FOR VIBRATION MEASUREMENTS
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MEMS COMES OF AGE - REVIEW OF A NEW BROADBAND 20 KHZ MEMS ACCELEROMETER FOR VIBRATION MEASUREMENTS

机译：MEMS时代的到来-一款用于振动测量的新型宽带20 KHZ MEMS加速度计的综述

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Condition Monitoring for much of the installed base of Balance-of-Plant equipment is route based, if at all, due to the high cost of implementation and deployment of continuous monitoring systems. Low cost MEMS-based accelerometer solutions such as autonomous smart sensors, wireless and other networked systems have been offered to the market for the last 5 years, expanding into new applications. MEMS based Condition Monitoring systems have reduced the cost per node from $1000's to S100's. MEMS based sensors, with integrated signal conditioning, also offers the capability to integrate various industrial interface options, simplifying system implementation and enabling the development of a new generation of connected smart sensors. Although several attributes of MEMS technology- such as size, weight, power, cost and high levels of functionality within the integrated signal conditioning are already compelling, market penetration has been hampered by relatively low levels of performance in terms of noise density and resonant frequencies. High frequency MEMS accelerometers have been on the market for years, offering resonant frequencies as high as 22 kHz and Full Scale Ranges up to ±500g- but with high noise levels. On the other hand, available low noise MEMS sensors have low resonant frequency operation, serving some Condition Monitoring applications where very low frequency operation is of value, but with limited utility for diagnostic evaluation. Investment in MEMS process technology has progressed to the point where the improvements in MEMS performance are enough to make MEMS a viable option for a wider range of Condition Monitoring applications. Sensors with resonant frequencies to 22 kHz and beyond, with noise densities down to 25μg/√Hz and below are now possible with MEMS structures and process technology. Careful design of signal conditioning electronics fully exploits the low Brownian motion noise of these new sensors. This paper will present data demonstrating the state of MEMS technology development and performance levels, with comparison to PZT Condition Monitoring accelerometers currently in the market.
机译：由于实施和部署连续监控系统的高昂成本，对工厂安装的大部分已安装基础的状态监控（如果有的话）都是基于路线的。过去5年以来，低成本的基于MEMS的加速度计解决方案（例如自主智能传感器，无线和其他联网系统）已投放市场，并扩展到新的应用领域。基于MEMS的状态监测系统将每个节点的成本从1000美元降低到了S100。具有集成信号调节功能的基于MEMS的传感器还具有集成各种工业接口选项的能力，从而简化了系统的实现，并能够开发新一代的连接式智能传感器。尽管MEMS技术的几个属性（例如尺寸，重量，功率，成本和集成信号调节中的高功能性）已经令人信服，但由于噪声密度和谐振频率相对较低的性能水平，市场渗透受到了阻碍。高频MEMS加速度计已投放市场多年，提供高达22 kHz的谐振频率和高达±500g的满量程范围，但噪声水平很高。另一方面，可用的低噪声MEMS传感器具有较低的谐振频率操作，可用于某些状态监视应用，这些应用中非常重要的是低频操作，但诊断评估的实用性有限。对MEMS工艺技术的投资已经发展到足以使MEMS性能提高到足以使MEMS成为各种状态监测应用的可行选择的地步。现在，借助MEMS结构和工艺技术，可以实现谐振频率达到22 kHz甚至更高，噪声密度低至25μg/√Hz以及更低的传感器。精心设计的信号调节电子设备充分利用了这些新型传感器的低布朗运动噪声。与目前市场上的PZT状态监测加速度计相比，本文将展示证明MEMS技术发展和性能水平的数据。

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