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Simulations of spatial DSA morphology, DSA-aware assist features and block copolymer-homopolymer blends

机译：模拟空间DSA形态，DSA感知辅助功能和嵌段共聚物-均聚物共混物

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Further enhancements to Monte Carlo and Self-Consistent Field Theory Directed Self-Assembly (DSA) simulation capabilities implemented in GLOBALFOUNDRIES are presented and discussed, along with the results of their applications. We present the simulation studies of DSA in graphoepitaxy confinement wells, where the DSA process parameters are varied in order to determine the optimal set of parameters resulting in a robust and etch transferrable phase morphology. A novel concept of DSA-aware assist features for the optical lithography process is presented and demonstrated in simulations. The results of the DSA simulations and studies for the DSA process using a blend of homopolymers and diblock copolymers are also presented and compared with the simulated diblock copolymer systems.

机译：提出并讨论了对GLOBALFOUNDRIES中实现的蒙特卡洛和自洽场论指导的自组装（DSA）仿真功能的进一步增强，以及它们的应用结果。我们介绍了在石墨外延封闭井中进行DSA的模拟研究，在这些井中改变DSA工艺参数以确定最佳的参数集，从而产生稳定且可蚀刻的相态形态。仿真中介绍并演示了用于光刻工艺的DSA感知辅助功能的新颖概念。还介绍了使用均聚物和二嵌段共聚物共混物进行DSA方法的DSA模拟结果和研究结果，并将其与模拟二嵌段共聚物体系进行了比较。

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来源
《Alternative lithographic technologies VI》|2014年|904908.1-904908.10|共10页
会议地点 San Jose CA(US)
作者
Azat Latypov; Tamer H. Coskun; Grant Garner; Moshe Preil; Gerard Schmid; Ji Xu; Yi Zou;
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作者单位

GLOBALFOUNDRIES Inc, 2600 Great America Way, Santa Clara, CA, USA 95054;

GLOBALFOUNDRIES Inc, 2600 Great America Way, Santa Clara, CA, USA 95054;

GLOBALFOUNDRIES Inc, 2600 Great America Way, Santa Clara, CA, USA 95054;

GLOBALFOUNDRIES Inc, 2600 Great America Way, Santa Clara, CA, USA 95054;

GLOBALFOUNDRIES Inc, 257 Fuller Rd., NFS Suite 380, Albany, NY, USA 12230;

GLOBALFOUNDRIES Inc, 257 Fuller Rd., NFS Suite 380, Albany, NY, USA 12230;

GLOBALFOUNDRIES Inc, 2600 Great America Way, Santa Clara, CA, USA 95054;

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原文格式 PDF
正文语种 eng
中图分类
关键词
directed self-assembly; DSA; block copolymers; BCP; SCFT; Monte Carlo;

机译：定向自组装； DSA；嵌段共聚物BCP； SCFT；蒙特卡洛;

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专利

1. Directed Assembly Of Asymmetric Ternary Block Copolymer-homopolymer Blends Using Symmetric Block Copolymer Into Checkerboard Trimming Chemical Pattern [J] . Huiman Kang, Gordon S. W. Craig, Paul F. Nealey Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures . 2008,第6期

机译：使用对称嵌段共聚物将不对称三元嵌段共聚物-均聚物共混物定向组装到棋盘饰边化学图案中
2. Instability of the Microemulsion Channel in Block Copolymer-Homopolymer Blends [J] . Vorselaars Bart, Spencer Russell K. W., Matsen Mark W. Physical review letters . 2020,第11期

机译：嵌段共聚物 - 均聚物共混物中微乳液通道的不稳定性
3. Uniform Toroidal Micelles via the Solution Self-Assembly of Block Copolymer-Homopolymer Blends Using a "Frustrated Crystallization" Approach [J] . Qiu Huibin, Oliver Alex M., Gwyther Jessica, Macromolecules . 2019,第1期

机译：使用“沮丧的结晶”方法，通过溶液自组装的均匀环形胶束通过“沮丧的结晶”方法自组装
4. DSA-aware assist features [C] . Azat Latypov, Tamer H. Coskun Conference on alternative lithographic technologies VII . 2015

机译：DSA感知辅助功能
5. The directed assembly of block copolymer-homopolymer ternary blend films: Materials and processes. [D] . Stuen, Karl O. 2009

机译：嵌段共聚物-均聚物三元共混膜的定向组装：材料和工艺。
6. Comparing blends and blocks: Synthesis of partially fluorinated diblock polythiophene copolymers to investigate the thermal stability of optical and morphological properties [O] . Pierre Boufflet, Sebastian Wood, Jessica Wade, 2016

机译：共混物和嵌段的比较：部分氟化的二嵌段聚噻吩共聚物的合成以研究光学和形态学性质的热稳定性
7. Photoinduced optical anisotropy in azobenzene containing block copolymer-homopolymer blends. Influence of microstructure and molecular weight [O] . Berges Cristina, Gimeno Nélida, Oriol Luis, 2012

机译：含偶氮苯的嵌段共聚物-均聚物共混物中的光诱导光学各向异性。微观结构和分子量的影响

Simulations of spatial DSA morphology, DSA-aware assist features and block copolymer-homopolymer blends

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