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首页> 外文会议>American Society of Mechanical Engineers(ASME) Design Engineering Technical Conferences and Computers and Information in Engineering Conference 2004(DETC 2004) vol.2 pt B: Biennial Mechanisms and Robotics Conference; 20040928-1002; Salt Lake City,UT(US) >DESIGN OPTIMIZATION FOR A PARALLEL MEMS MECHANISM WITH FLEXURE JOINTS
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DESIGN OPTIMIZATION FOR A PARALLEL MEMS MECHANISM WITH FLEXURE JOINTS

机译：具有挠性接头的并行MEMS机构的设计优化

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摘要

This paper presents an analysis tool and design method for MEMS parallel mechanisms. Due to processing constraints in MEMS fabrication, flexure joints are frequently used in MEMS mechanisms. Flexure joints offer advantages over other joint designs due to their monolithic characteristics. They can be used to reduce the size of manipulators or to increase the precision of motion. Their inherent flexibility, however, also results in task space compliance which needs to be carefully designed to match the task specification. This paper presents an analysis and design tool for such mechanisms by using the differential kinematics. Performance metrics are chosen based on manipulability and task stiffness matrices, which in turn are used in a multi-objective optimization. As an illustrative example, a 1-DOF MEMS parallel mechanism based on the macro- and meso-scale models designed by NIST is considered with several choices of performance metrics and design variables. The resulting designs are successfully fabricated using DRIE process.
机译：本文提出了一种用于MEMS并联机构的分析工具和设计方法。由于MEMS制造中的工艺限制，挠性接头经常用于MEMS机构中。挠性接头由于其整体特性而比其他接头设计更具优势。它们可用于减小操纵器的尺寸或增加运动的精度。但是，它们固有的灵活性也导致任务空间合规性，需要仔细设计以符合任务规范。本文提出了一种利用微分运动学的此类机构的分析和设计工具。基于可操作性和任务刚度矩阵选择性能指标，这些指标又用于多目标优化中。作为说明性示例，考虑了基于NIST设计的宏观和中观模型的1-DOF MEMS并行机制，并选择了性能指标和设计变量。使用DRIE工艺成功制作了最终的设计。

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