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首页> 外文会议>American Society of Mechanical Engineers(ASME) Integrated Nanosystems Conference: Design, Synthesis, and Applications; 20050914-16; Berkeley,CA(US) >SYNTHESIS OF NANOCOMPOSITES BY BALLISTIC IMPACTION OF NANOPARTICLES
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SYNTHESIS OF NANOCOMPOSITES BY BALLISTIC IMPACTION OF NANOPARTICLES

机译：弹丸冲击合成纳米复合材料。

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摘要

We are investigating ballistic impact assembly of nanoparticles to form a new class of materials for superhard coatings and micromolded MEMS parts. Nanoparticles are generated by dissociating vapor-phase reactants injected downstream of a thermal plasma and expanding the resultant flow through a converging nozzle into a low-pressure chamber. The nanoparticle-laden gases achieve hypersonic velocities due to the pressure difference between the reaction region (450 torr) and the low-pressure chamber (～2 torr). Particles are deposited by one of two processes: (a) by placing a substrate 20mm downstream of the flow, which results in a bow shock at the substrate and high impact velocities (calculated to be over 2000 m/s for a 20 run SiC particle): termed as high-rate deposition, (b) by focusing the particles into a tight beam (width of ～35 μm) using aerodynamic lenses, and subsequent impaction on a translating substrate: termed as focused beam deposition. Thus far, nanoparticle deposits consisting of combinations of Si, Ti, C and N have been explored.
机译：我们正在研究纳米颗粒的弹道冲击组装，以形成用于超硬涂层和微成型MEMS零件的新型材料。通过离解注入到热等离子体下游的气相反应物并使通过聚束喷嘴产生的流扩展到低压室中，可以生成纳米颗粒。由于反应区域（450托）和低压腔（〜2托）之间的压力差，载有纳米颗粒的气体达到了超音速。可以通过以下两种方法之一来沉积颗粒：（a）通过在流的下游放置20mm的基材，从而在基材上产生弓形冲击和高冲击速度（对于20行程的SiC颗粒，计算得出的速度超过2000 m / s ）：称为高速沉积，（b）使用空气动力学透镜将粒子聚焦成束紧的光束（宽度约35μm），然后撞击平移基板：称为聚焦束沉积。迄今为止，已经研究了由Si，Ti，C和N的组合组成的纳米颗粒沉积物。

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