MECHANICAL TESTING OF FREESTANDING NANO-FILMS USING A NOVEL FINITE DIAMETER TIP MEMS-BASED TESTING MACHINE

机译：基于新型有限直径尖端MEMS的测试机对自由纳米膜的机械测试

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We present a new experimental method for measuring the mechanical properties of nanoscale-thick materials using the free-standing membrane test. Freestanding circular membranes are centrally deflected using a spherical indenter attached to a microfabricated fixed-fixed beam device. Experiments of this type allow us to extract mechanical properties of the thin films without the complicating effects of the substrate, enabling accurate study of length scale effects. These experiments differ from previous work by testing freestanding films and by including the finite contact size of the indenter tip.

机译：我们提出了一种新的实验方法，用于使用独立式膜试验测量纳米级厚材料的机械性能。独立的圆形膜使用连接到微细的固定-固定梁装置的球形压头在中心偏转。这种类型的实验使我们能够提取薄膜的机械性能，而没有基材的复杂作用，从而能够精确研究长度尺度效应。这些实验与以前的工作有所不同，它们通过测试独立式薄膜并包括压头尖端的有限接触尺寸。

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《American Society of Mechanical Engineers(ASME) Integrated Nanosystems Conference: Design, Synthesis, and Applications; 20050914-16; Berkeley,CA(US)》|2005年|P.9-10|共2页
会议地点 BerkeleyCA(US)
作者
Zayd C. Leseman; Zuhaib Sheikh; Thomas J. Mackin; Matthew Begley;
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University of Illinois Urbana-Champaign Urbana, IL;

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原文格式 PDF
正文语种 eng
中图分类半导体技术;
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MECHANICAL TESTING OF FREESTANDING NANO-FILMS USING A NOVEL FINITE DIAMETER TIP MEMS-BASED TESTING MACHINE

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