PRE-SLIDING TANGENTIAL DEFLECTIONS CAN GOVERN THE FRICTION OF MEMS DEVICES

机译：滑动前切线偏斜可以控制MEMS设备的摩擦

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We have measured pre-sliding tangential deflections (PSTD) between micromachined surfaces of up to 200 nanometers in length before the static friction event using a polysilicon nanotractor actuator. The detailed PSTD structure is resolved by a one-nanometer-resolution in-plane optical metrology we have developed, and may be a manifestation of discrete asperity-asperity interactions leading to an effective spatial distribution of friction coefficients. Results indicate a dependence on surface treatment, with a perfluorinated eight-carbon chain monolayer coating showing substantially different PSTD than an eighteen-carbon chain hydrocrabon monolayer. This behavior may qualitatively be related to variations in dynamic versus static friction. We present a simple phenomenological model that captures some of the behavior of PSTD, and suggest some possible microscopic interpretations.

机译：我们已经测量了在使用多晶硅纳米牵引器致动器产生静摩擦事件之前，长度达200纳米的微加工表面之间的预滑动切向挠度（PSTD）。我们已经开发出的一种纳米分辨率的平面光学计量学解决了详细的PSTD结构，并且可能是离散的凹凸不平相互作用的表现，从而导致了摩擦系数的有效空间分布。结果表明对表面处理的依赖性，全氟化的八碳链单层涂层显示出的PSTD与十八碳链加氢单分子层基本不同。该行为可以定性地与动摩擦与静摩擦的变化有关。我们提出了一个简单的现象学模型，该模型捕获了PSTD的某些行为，并提出了一些可能的微观解释。

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《American Society of Mechanical Engineers(ASME)/Society of Tribologists and Lubrication Engineers(STLE) International Joint Tribology Conference 2004(IJTC 2004) vol.1 pt.A; 20041024-27; Long Beach,CA(US)》|2004年|P.113-116|共4页
会议地点 Long BeachCA(US)
作者
Alex D. Corwin; Mark D. Street; Robert W. Carpick; William R. Ashurst; Maarten P. de Boer;
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作者单位

Sandia National Laboratories, Albuquerque NM;

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原文格式 PDF
正文语种 eng
中图分类机械摩擦、磨损与润滑;
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4. PRE-SLIDING TANGENTIAL DEFLECTIONS CAN GOVERN THE FRICTION OF MEMS DEVICES [C] . Alex D. Corwin, Mark D. Street, Robert W. Carpick, ASME/STLE International Joint Tribology Conference . 2004

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PRE-SLIDING TANGENTIAL DEFLECTIONS CAN GOVERN THE FRICTION OF MEMS DEVICES

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