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首页> 外文会议>American Society of Mechanical Engineers(ASME)/Society of Tribologists and Lubrication Engineers(STLE) International Joint Tribology Conference 2004(IJTC 2004) vol.1 pt.A; 20041024-27; Long Beach,CA(US) >MICRO/NANOTRIBOLOGY OF RF MEMS SWITCHES
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MICRO/NANOTRIBOLOGY OF RF MEMS SWITCHES

机译：RF MEMS开关的微/纳米

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Microelectromechanical systems (MEMS) radio frequency (RF) switches hold great promise in a myriad of commercial, aerospace, and military applications. MEMS switches offer important advantages over current electromechanical and solid state technologies including high linearity, low insertion loss, low power consumption, good isolation, and low cost. However, there is little fundamental understanding of the factors determining the performance and reliability of these devices. Our previous work investigated fundamentals of hot-switched direct current (DC) gold (Au) contacts using a modified microadhesion apparatus as a switch simulator. Those experiments were conducted under precisely controlled operating conditions in air at MEMS-scale forces with an emphasis on the role of surface forces and electric current on switch performance, reliability, and durability. Electric current had a profound effect on deformation mechanisms, adhesion, contact resistance (R), and reliability/durability. At low current (1-10 μA), asperity creep and switching induced adhesion were the most important observations, whereas, at high current (1-10 mA), lack of adhesion and switch shorting by nanowire formation were prominent. This presentation will focus on our recent work on the fundamentals of capacitive switches along with lubrication of switch contacts (both DC and capacitive). Capacitive switches with metal-to-dielectric contacts (typically Au-on-silicon nitride) are used in high frequency applications (10 GHz and above). Possible failure mechanisms of capacitive switches include adhesion, self-actuation, and dielectric charging. Mechanisms controlling adhesion are of particular interest in these systems, especially in regard to the role of dielectric charging.
机译：微机电系统（MEMS）射频（RF）开关在众多的商业，航空航天和军事应用中都具有广阔的前景。与当前的机电和固态技术相比，MEMS开关具有重要的优势，包括高线性度，低插入损耗，低功耗，良好的隔离性和低成本。但是，对决定这些设备的性能和可靠性的因素了解甚少。我们以前的工作使用改进的微粘合设备作为开关模拟器，研究了热开关直流（DC）金（Au）触点的基本原理。这些实验是在空气中以MEMS尺度的力在精确控制的工作条件下进行的，重点是表面力和电流对开关性能，可靠性和耐久性的作用。电流对变形机理，附着力，接触电阻（R）和可靠性/耐久性具有深远的影响。在低电流（1-10μA）下，粗糙蠕变和开关引起的粘附是最重要的观察结果，而在高电流（1-10 mA）下，由于纳米线形成而导致的粘附和开关短路缺乏是突出的。本演讲将重点介绍我们最近在电容式开关基础知识以及开关触点（DC和电容式）的润滑方面的工作。具有金属与电介质接触的电容开关（通常为氮化硅金）在高频应用（10 GHz及以上）中使用。电容开关的可能故障机制包括粘附，自驱动和介电充电。在这些系统中，特别是在介电充电方面，控制粘附的机制尤为重要。

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