AFM-BASED TESTING AND MEASUREMENTS OF CONTACT AND STICTION IN A MICROMECHANICAL SWITCH

机译：微动开关中基于AFM的接触和位置测试和测量

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Cycling of a micromechanical switch with gold-on-gold contacts demonstrates that the contact resistance decreases and the adherence force increases. An experimental setup using a Scanning Probe Microscope (SPM) is allowing the fundamental physics of this behavior to be better understood. The setup includes two side-by-side cantilevers - one of high stiffness which applies the repeated loading and the other a standard profiling cantilever allowing in-situ measurements of topographical changes.

机译：具有金对金触点的微机械开关的循环表明，接触电阻减小，粘附力增大。使用扫描探针显微镜（SPM）进行的实验设置可以更好地理解这种行为的基本物理原理。该设置包括两个并排的悬臂-一种具有高刚度，可施加重复载荷，另一种是标准轮廓悬臂，可就地测量地形变化。

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《American Society of Mechanical Engineers(ASME)/Society of Tribologists and Lubrication Engineers(STLE) International Joint Tribology Conference 2004(IJTC 2004) vol.1 pt.A; 20041024-27; Long Beach,CA(US)》|2004年|P.65-68|共4页
会议地点 Long BeachCA(US)
作者
Lei Chen; Nicol E. McGruer; George G. Adams;
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MicroFabrication Laboratory Northeastern University, Boston, MA 02115;

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原文格式 PDF
正文语种 eng
中图分类机械摩擦、磨损与润滑;
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AFM-BASED TESTING AND MEASUREMENTS OF CONTACT AND STICTION IN A MICROMECHANICAL SWITCH

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