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首页> 外文期刊>Sensors and Actuators, A. Physical >Investigation of anti-stiction coating for ohmic contact MEMS switches with thiophenol and 2-naphthalenethiol self-assembled monolayer
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Investigation of anti-stiction coating for ohmic contact MEMS switches with thiophenol and 2-naphthalenethiol self-assembled monolayer

机译：含硫酚和2-萘硫醇自组装单分子膜的欧姆接触MEMS开关抗粘涂层的研究

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摘要

Anti-stiction coating with a conductive self-assembled monolayer (SAM) formed by π-conjugated bonds was investigated for ohmic contact microelectromechanical system (MEMS) switches with low-load contacts. SAMs of thiophenol (C _6H _5SH, TP) or 2-naphthalenethiol (C _(10)H _7SH, 2NT) were coated on Au samples with different surface roughness to investigate the effects of the surface asperities on the adhesion force and contact resistance. The adhesion force was measured using a silicon tipless cantilever in the relative humidity range of 10-85% and the contact resistance was measured in the contact force range of 0-70 μN using a conductive tipless cantilever coated with Au for the SAM coated samples and compared with those for a Au sample surface. The adhesion force measurements indicate that the TP and 2NT coatings can prevent a liquid meniscus from forming on device surfaces due to their hydrophobic character caused by the protruding aromatic group. In addition, it was confirmed that these coatings could reduce van der Waals forces more than Au coating. Contact resistance measurements revealed that an electric current begins to flow with smaller contact force for TP and 2NT coated samples than for Au coated samples. The measured contact resistances of the SAM and Au coated samples were comparable. Based on these results, SAMs of TP and 2NT have excellent potential as anti-stiction coating for MEMS switch contacts.
机译：针对具有低负载触点的欧姆接触微机电系统（MEMS）开关，研究了具有由π共轭键形成的导电自组装单分子层（SAM）的抗粘涂层。将苯硫酚（C _6H _5SH，TP）或2-萘硫醇（C _（10）H _7SH，2NT）的SAMs涂覆在具有不同表面粗糙度的Au样品上，以研究表面粗糙度对粘附力和接触电阻的影响。使用相对湿度为10％至85％的无针尖硅悬臂来测量粘附力，并且对于使用SAM涂覆的样品，使用涂有Au的导电无针尖悬臂来在0-70μN的接触力范围内测量接触电阻​​。与Au样品表面相比。粘附力测量结果表明，TP和2NT涂层可防止液体弯月面在设备表面形成，这是由于突出的芳族基团引起的疏水性。另外，已证实这些涂层比Au涂层更能降低范德华力。接触电阻测量显示，与AU涂层样品相比，TP和2NT涂层样品的电流以较小的接触力开始流动。 SAM和Au涂层样品的测量接触电阻​​相当。基于这些结果，TP和2NT的SAM作为MEMS开关触点的抗粘涂层具有极好的潜力。

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