PNEUMATIC SERVO BEARING ACTUATOR FOR ULTRAPRECISE POSITIONING- BASIC PERFORMANCES OF PROTOTYPE MODEL

机译：超精确定位的气动伺服轴承执行器-原型模型的基本性能

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A pneumatic servo bearing actuator was developed as a potential new actuator to meet the demands of advances in precision mechanics. All basic operations, such as repetition accuracy, fluctuation levels, frequency response, and step response clearly indicated the good ultraprecise positioning ability of this actuator.

机译：气动伺服轴承执行器是一种潜在的新型执行器，可满足精密机械发展的要求。所有基本操作（例如重复精度，波动水平，频率响应和阶跃响应）清楚地表明了该执行器的良好超精密定位能力。

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《American Society of Mechanical Engineers(ASME)/Society of Tribologists and Lubrication Engineers(STLE) International Joint Tribology Conference; 20071022-24; San Diego,CA(US)》|2007年|P.60-61|共2页
会议地点 San DiegoCA(US)
作者
T. Hirayama; K. Sasaki; R. Mizuno; T. Kitagawa; M. Kadotani; T. Matsuoka; H. Yabe;
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作者单位

Dept. of Mechanical Engineering, Doshisha University, Tatara, Kyotanabe, Kyoto, Japan;

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原文格式 PDF
正文语种 eng
中图分类机械摩擦、磨损与润滑;
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1. Pneumatic Servo Bearing Actuator with Multiple Bearing Pads for Ultraprecise Positioning [J] . Shuhei Tsujimura, Yusuke Hashimoto, Takashi Matsuoka, International journal of automation technology . 2013,第5期

机译：气动伺服轴承致动器，带有多个轴承垫，可实现超精密定位
2. Development of ultraprecise positioning X–Y stage composed of pneumatic servo bearing actuators [J] . Journal of Engineering Tribology . 2011,第7期

机译：由气动伺服轴承致动器组成的超精密定位X-Y工作台的开发
3. Development of ultraprecise positioning X-Y stage composed of pneumatic servo bearing actuators [J] . A. Sugimoto, H. Danjo, T. Kitagawa, Proceedings of the Institution of Mechanical Engineers, Part J. Journal of engineering tribology . 2011,第7期

机译：由气动伺服轴承致动器组成的超精密定位X-Y平台的开发
4. PNEUMATIC SERVO BEARING ACTUATOR FOR ULTRAPRECISE POSITIONING- BASIC PERFORMANCES OF PROTOTYPE MODEL [C] . T. Hirayama, K. Sasaki, R. Mizuno, American Society of Mechanical Engineers/Society of Tribologists and Lubrication Engineers International Joint Tribology Conference . 2007

机译：用于超薄定位的气动伺服轴承执行器 - 原型模型的基本性能
5. Exploiting natural characteristics of pneumatic servo-actuation through multi-input control. [D] . Shen, Xiangrong. 2006

机译：通过多输入控制开发气动伺服执行器的自然特性。
6. Development of X-Y Servo Pneumatic-Piezoelectric Hybrid Actuators for Position Control with High Response Large Stroke and Nanometer Accuracy [O] . Mao-Hsiung Chiang 2010

机译：X-Y伺服气动-压电混合执行器的开发用于高响应大行程和纳米精度的位置控制
7. Modeling and control of industrial servo pneumatic actuator system [O] . Hajari Mohammad Hamed 2012

机译：工业伺服气动执行器系统的建模与控制

PNEUMATIC SERVO BEARING ACTUATOR FOR ULTRAPRECISE POSITIONING- BASIC PERFORMANCES OF PROTOTYPE MODEL

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