• 主题
高级搜索  >
历史搜索 清空历史
首页> 外文会议>American Society of Mechanical Engineers(ASME)/Society of Tribologists and Lubrication Engineers(STLE) International Joint Tribology Conference; 20071022-24; San Diego,CA(US) >EFFECT OF PROCESS CONDITIONS ON ADHESION BETWEEN STAMP AND POLYMER FILM USED IN THERMAL NANOIMPRINT LITHOGRAPHY
【24h】

EFFECT OF PROCESS CONDITIONS ON ADHESION BETWEEN STAMP AND POLYMER FILM USED IN THERMAL NANOIMPRINT LITHOGRAPHY

机译：工艺条件对热纳米压印术中印章和聚合物膜之间附着力的影响

获取原文
获取原文并翻译 | 示例
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

In this study, the adhesion characteristics between stamp and thermoplastic polymer film were studied in order to investigate the effect of process conditions on the adhesion between two materials. Imprint pressure, separation speed and coating of anti-sticking layer (ASL) were considered as the process conditions. A piece of fused silica without patterns on its surface was used as a stamp and the thermoplastic polymer film was made on Si substrate by the spin-coating of commercial polymer solution such as mr-I PMMA and mr-I 7020. The ASL was derived from (1H, 1H, 2H, 2H -perfluorooctyl) trichlorosilane (F_(13)-OTS) and coated on the fused silica stamp in vapor phase. The adhesion force was measured in various process conditions when the polymer film was separated from the stamp. As a result, it is found that the adhesion force was changed according to the polymer materials and the adhesion reduction effect of ASL also appeared differently. In addition, the adhesion force did not depend on the imprint pressure in cases of the stamp coated with ASL while it increased as the imprint pressure increased in cases of the stamp without ASL. The dependency on separation speed appeared stronger in cases without ASL.
机译：在这项研究中，研究了压模和热塑性聚合物薄膜之间的粘附特性，以研究工艺条件对两种材料之间粘附的影响。压印压力，分离速度和防粘层（ASL）的涂层被视为工艺条件。使用一片表面没有图案的熔融二氧化硅作为压模，并通过旋涂商用聚合物溶液（例如mr-I PMMA和mr-I 7020）在Si基板上制成热塑性聚合物膜。由（1H，1H，2H，2H-全氟辛基）三氯硅烷（F_（13）-OTS）制成并在气相上涂覆在熔融二氧化硅印模上。当聚合物膜与压模分离时，在各种工艺条件下测量粘合力。结果发现，粘合力根据聚合物材料而变化，并且ASL的粘合力降低效果也有所不同。另外，在ASL涂布的压模的情况下，粘附力不取决于压印压力，而在没有ASL的压模的情况下，粘附力随着压印压力的增加而增加。在没有ASL的情况下，对分离速度的依赖性似乎更强。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号