HARDNESS AND FRICTIONAL PROPERTIES OF ALUMINA COATINGS BY AC INVERTED MAGNETRON SPUTTERING TECHNIQUE

机译：交流磁控溅射技术对氧化铝涂层的硬度和摩擦性能

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Alumina thin film coatings of 500 nm thickness were deposited on silicon substrates by AC inverted magnetron sputtering technique at 350℃. The effect of deposition power and oxygen partial pressure on the hardness and frictional performances of the alumina coatings were investigated using a nanoindenter. The film hardness varied with both the power and the oxygen partial pressure with the power had more pronounced effect. The maximum hardness of 22 GPa was obtained at an optimum power of 5 kW and oxygen partial pressure of 40%. The coefficient of friction decreased with the increase in hardness.

机译：在350℃下通过交流磁控溅射技术将500nm厚的氧化铝薄膜涂层沉积在硅基板上。使用纳米压头研究了沉积功率和氧分压对氧化铝涂层硬度和摩擦性能的影响。膜硬度随功率的变化而变化，氧分压随功率的变化而变化更为显着。在5 kW的最佳功率和40％的氧气分压下获得22 GPa的最大硬度。摩擦系数随着硬度的增加而降低。

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来源
《American Society of Mechanical Engineers(ASME)/Society of Tribologists and Lubrication Engineers(STLE) International Joint Tribology Conference; 20071022-24; San Diego,CA(US)》|2007年|P.72|共1页
会议地点 San DiegoCA(US)
作者
H. Wang; A. Aryasomayajula; M. Zou; M. Gordon; D. Bhat;
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作者单位

Department of Mechanical Engineering, University of Arkansas, Fayetteville, AR 72701, USA;

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会议组织
原文格式 PDF
正文语种 eng
中图分类机械摩擦、磨损与润滑;
关键词
nanohardness; alpha alumina; coefficient of friction;

机译：纳米硬度;α氧化铝;摩擦系数;

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专利

1. Transmission electron microscopy and X-ray diffraction analysis of alumina coating by alternate-current inverted magnetron-sputtering technique [J] . A. Aryasomayajula, S. Canovic, D. Bhat, Thin Solid Films . 2007,第2a4期

机译：交流磁控溅射技术对氧化铝涂层的透射电子显微镜和X射线衍射分析
2. Nanocrystalline gamma alumina coatings by inverted cylindrical magnetron sputtering [J] . Khanna A, Bhat DG Surface & Coatings Technology . 2006,第1a2期

机译：倒置圆柱磁控溅射纳米晶γ氧化铝涂层
3. CN{sub}x coatings sputtered by DC magnetron: hardness, nitrogenation and optical properties [J] . F. Fendrych, L. Pajasova, T. Wagner, Diamond and Related Materials . 1999,第8a9期

机译：直流磁控管溅射的CN {sub} x涂层：硬度，氮化和光学性能
4. HARDNESS AND FRICTIONAL PROPERTIES OF ALUMINA COATINGS BY AC INVERTED MAGNETRON SPUTTERING TECHNIQUE [C] . H. Wang, A. Aryasomayajula, M. Zou, ASME/STLE International Joint Tribology Conference . 2007

机译：AC倒磁控溅射技术的氧化铝涂层硬度和摩擦性能
5. Low temperature alpha alumina thin film coating for cutting tool application by AC inverted magnetron sputtering technique. [D] . Aryasomayajula, Aditya. 2008

机译：通过交流反向磁控溅射技术在切削工具应用中使用的低温α氧化铝薄膜涂层。
6. Suppl 1-M16: Formation of Solution-derived Hydroxyapatite Coatings on Titanium Alloy in the Presence of Magnetron-sputtered Alumina Bond Coats [O] . Anna Zykova, Vladimir Safonov, Anna Yanovska, 2015

机译：Suppl 1-M16：在磁控溅射氧化铝键合涂层的存在下钛合金上溶液衍生的羟基磷灰石涂层的形成
7. Controlling the Structural, Mechanical and Frictional Properties of MoSx Coatings by High-Power Impulse Magnetron Sputtering [O] . David Kokalj, Jörg Debus, Dominic Stangier, 2020

机译：通过高功率脉冲磁控溅射控制MOSX涂层的结构，机械和摩擦性能

HARDNESS AND FRICTIONAL PROPERTIES OF ALUMINA COATINGS BY AC INVERTED MAGNETRON SPUTTERING TECHNIQUE

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