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首页> 外文会议>American Society of Mechanical Engineers(ASME)/Society of Tribologists and Lubrication Engineers(STLE) International Joint Tribology Conference; 20071022-24; San Diego,CA(US) >TEMPERATURE DEPENDENT NANOTRIBOLOGICAL BEHAVIOR OF ULTRATHIN THERMOPLASTIC POLYMERIC RESIST FILMS STUDIED BY USE OF AFM
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TEMPERATURE DEPENDENT NANOTRIBOLOGICAL BEHAVIOR OF ULTRATHIN THERMOPLASTIC POLYMERIC RESIST FILMS STUDIED BY USE OF AFM

机译：使用AFM研究超薄热塑聚合物薄膜的温度依赖的纳米行为。

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摘要

Nanoimprint Lithography (NIL) is emerging novel high resolution fabrication technique. In principle it is a hot embossing of a polymer resist used as a mask in further process steps. Currently, a much effort is ongoing on optimizing the properties of the polymer resists by chemical modifications. To assess the influence of them on the polymer properties it was required to develop a methodology for testing these materials in terms of their use in the NIL process. It turned out that the temperature dependent tribological properties of them are especially useful. In this study an atomic force microscope (AFM) with a modified silicon spherical-tip cantilever was used to test the temperature dependent nanotribological properties of mr-I 7000E amorphous thermoplastic polymer resist devoted to NIL. The methodology, the equipment used in these studies as well as the results of the estimation of lateral forces versus temperature will be presented and discussed.
机译：纳米压印光刻（NIL）是新兴的高分辨率制造技术。原则上是在其他工艺步骤中用作掩模的聚合物抗蚀剂的热压花。当前，在通过化学改性来优化聚合物抗蚀剂的性能方面正在进行大量努力。为了评估它们对聚合物性能的影响，需要开发一种方法来测试这些材料在NIL工艺中的用途。事实证明，它们的与温度有关的摩擦学特性特别有用。在这项研究中，原子力显微镜（AFM）具有改良的硅球形尖端悬臂，用于测试致力于NIL的MR-I 7000E非晶热塑性聚合物抗蚀剂的温度依赖性纳米摩擦学性能。将介绍和讨论这些方法中的方法，这些研究中使用的设备以及横向力与温度的估算结果。

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