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首页> 外文会议>Annual Semiconductor Pure Water and Chemicals Conference(SPWCC): UPW Track; 20050215-16; Santa Clara,CA(US) >Comparison of Bacteria Enumeration Between A Filter Culture Method And A Laser Scanning Cytometry Method
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Comparison of Bacteria Enumeration Between A Filter Culture Method And A Laser Scanning Cytometry Method

机译：滤池培养法与激光扫描细胞计数法细菌计数的比较。

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摘要

Semiconductor manufacturers strive to have the cleanest process water available for manufacturing their products. As line widths continue to shrink, concern about contamination on the wafer grows. One area of continuous improvement is reduction of the bacteria and bio-burden in the ultra-pure water (UPW) that touches the wafer surface. Methods that improve our ability to detect bacteria by culture frequently require longer times for incubation. Technology that was presented at the SPWCC in 1998 by researchers for Kurita Water Industries in their paper Analysis of Bacteria in Ultrapure Water Systems using Fluorescent Probe and Culture Method~2 offered an alternative method for rapid and improved sensitivity for enumerating bacteria. Texas Instruments (TI) has invested in comparing the two methods. This paper compares our 96 hour incubation standard method to the solid phase laser scanning cytometry method. The laser scanning cytometry instrument and reagents used for our tests are marketed by AES Chemunex. The sensitivity of the Chemunex ChemScan C far surpasses that of our established culture methods.
机译：半导体制造商努力获得可用于制造其产品的最清洁的工艺用水。随着线宽的不断缩小，对晶圆上污染的担忧也越来越大。持续改进的一个领域是减少接触晶圆表面的超纯水（UPW）中的细菌和生物负担。通过培养提高我们检测细菌能力的方法通常需要更长的孵育时间。 Kurita Water Industries的研究人员在1998年SPWCC上提出的技术使用荧光探针和培养方法〜2在超纯水系统中分析细菌提供了一种替代方法，可快速提高细菌计数的灵敏度。德州仪器（TI）已投资比较这两种方法。本文将我们的96小时孵育标准方法与固相激光扫描细胞计数法进行了比较。用于我们测试的激光扫描细胞仪和试剂由AES Chemunex销售。 Chemunex ChemScan C的灵敏度远远超过我们已建立的培养方法。

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