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Metal-organic hybrid metamaterial THz imaging band translators

机译：金属有机混合超材料太赫兹成像带转换器

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We investigate the feasibility of negative photoresist as a structural material in metal-organic hybrid THz imaging detectors using SU-8. We will discuss design of metamaterials for MEMS-based terahertz (THz) thermal sensors and design and microfabrication process for building SU8-based MEMS THz focal plane arrays. Metamaterials of this kind, exhibiting absorption properties comparable to those of resonant metamaterials made using traditional thin films, coupled with the applicability of SU-8 as a structural material, offer possibilities for quick, simple microfabrication of focal plane arrays of THz imaging detectors. SU-8 is a low-cost material that can quickly be spun onto a substrate at a wide range of thicknesses and photolithographically patterned into a variety of structures. This removes the need for both PECVD deposition and plasma etching, dramatically increasing the speed and lowering the cost of production of such FPAs. We further investigate feasibility of use of such detectors as band translators rather than traditional bimaterial devices. Translators would be optically probed with an infrared (IR) camera. Individual pixels would absorb THz radiation, heat up and the thermal image would be projected onto an infrared camera, effectively translating the image from THz into IR.
机译：我们研究使用SU-8的负有机光刻胶作为金属-有机混合太赫兹成像探测器中结构材料的可行性。我们将讨论用于基于MEMS的太赫兹（THz）热传感器的超材料的设计以及用于构建基于SU8的MEMS THz焦平面阵列的设计和微加工过程。这种超材料的吸收性能与使用传统薄膜制成的共振超材料的吸收性能相当，再加上SU-8作为结构材料的适用性，为THz成像探测器焦平面阵列的快速，简单的微制造提供了可能性。 SU-8是一种低成本材料，可以快速以各种厚度旋转到基板上，并通过光刻技术将其构图成各种结构。这消除了对PECVD沉积和等离子刻蚀的需求，从而显着提高了此类FPA的速度并降低了其生产成本。我们进一步研究了将这种检测器用作频段转换器而不是传统的双材料设备的可行性。可以使用红外（IR）摄像机对翻译器进行光学探测。各个像素将吸收太赫兹辐射，加热并且热图像将被投影到红外摄像机上，从而将图像从太赫兹有效地转换为红外。

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