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Rapid Fabrication of Biocompatible Hydrogels Microdevices Using Laser Interference Lithography

机译:使用激光干涉光刻技术快速制备生物相容性水凝胶微器件

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We report on fabrication of periodic arrays of polyethylene glycol diacrylate (PEG-DA), a biocompatible hydrogel, useful in biomedical applications. The structures were produced by means of multi beam laser interference lithography with both nanosecond (266 and 355 nm of wavelengths with pulses lasting 10 ns) and femtosecond pulsed lasers (800 nm of wavelength and 90 fs laser pulses). Configurations involving two, four and five laser beams were utilized obtaining a wide variety of patterns with different feature sizes in the micrometer scale. Through this technique, we demonstrated the ability to fabricate high feature density patterns over large areas without the use of templates or masks. In addition, resolution and geometrical characteristic of the periodic arrays are discussed as function of pulse duration and laser processing parameters. The photopolymerization nature of the process was also investigated.
机译:我们报告聚乙二醇二丙烯酸酯(PEG-DA),生物相容性水凝胶,可用于生物医学应用的周期性阵列的制造。该结构是通过多束激光干涉光刻技术制造的,既具有纳秒级(266和355 nm的波长,脉冲持续10 ns)又具有飞秒脉冲激光器(800 nm的波长和90 fs激光脉冲)。利用涉及两个,四个和五个激光束的配置,以微米级获得具有不同特征尺寸的多种图案。通过这项技术,我们证明了无需使用模板或遮罩即可在大面积上制造高特征密度图案的能力。另外,讨论了周期性阵列的分辨率和几何特性,作为脉冲持续时间和激光加工参数的函数。还研究了该方法的光聚合性质。

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