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Vibration Analysis of the Zigzag Micro-Structure for Energy Harvesting

机译:曲折形微结构用于能量收集的振动分析

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摘要

An analytical method is developed to calculate the natural frequencies and the corresponding mode shapes of a zigzag structure proposed for MEMS energy harvesting from ambient vibrations. The high natural frequencies of the existing designs of MEMS vibrational energy harvesters are serious drawbacks. A zigzag design is proposed to overcome this deficit. The governing partial differential equations are solved using separation of variables for each of the lateral beams in the structure. The vibration of each beam is related to the vibration of its neighbor beams by continuity and equilibrium conditions. Finally enforcing the boundary conditions results the corresponding eigenvalue problem revealing the natural frequencies and mode shapes. The usefulness of the design is proved by the relation between the natural frequencies and number of elements, providing a method of designing a MEMS harvester with low natural frequency.
机译:开发了一种分析方法来计算为从环境振动中收集MEMS能量而提出的之字形结构的固有频率和相应的模式形状。 MEMS振动能量收集器的现有设计的高固有频率是严重的缺点。提出了一种之字形设计来克服这一缺陷。使用结构中每个侧梁的变量分离来求解支配的偏微分方程。通过连续性和平衡条件,每个梁的振动与其相邻梁的振动有关。最后执行边界条件会导致相应的特征值问题,从而揭示出固有频率和振型。通过固有频率与元件数量之间的关系证明了该设计的有用性,从而提供了一种设计具有较低固有频率的MEMS收割机的方法。

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