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首页> 外文会议>Conference on Advanced Fabrication Technologies for Micro/Nano Optics and Photonics; 20080121-23; San Jose,CA(US) >Spiral zone plate imaging for soft x-ray microscopy
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Spiral zone plate imaging for soft x-ray microscopy

机译：螺旋波带片成像，用于软X射线显微镜

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摘要

Phase sensitive x-ray microscopy techniques are important in the study of samples that exhibit phase contrast. One way to detect these phase effects is to optically implement the radial Hilbert transform by using spiral zone plates (SZPs), resulting in the imaging of the amplitude and phase gradient in a sample. This is similar to differential interference contrast imaging in light microscopy. Soft x-ray microscopy using a SZP as a single element objective lens was demonstrated through the imaging of a 1 μm circular aperture at a wavelength of 2.73 nm. A regular zone plate, a charge 1 SZP, and a charge 2 SZP were fabricated on a silicon nitride membrane using electron beam lithography. The negative e-beam resist hydrogen silsesquioxane (HSQ) was used for patterning, and the zone plates were electroplated with nickel. These zone plates were then used as the imaging optic in a soft x-ray microscopy setup.
机译：相敏X射线显微镜技术在研究表现出相衬的样品中很重要。检测这些相位影响的一种方法是通过使用螺旋波带片（SZP）光学实现径向希尔伯特变换，从而对样本中的幅度和相位梯度进行成像。这类似于光学显微镜中的差分干涉对比成像。通过在2.73 nm波长处成像1μm圆形孔径，证明了使用SZP作为单元素物镜的软X射线显微镜。使用电子束光刻法在氮化硅膜上制造规则区带，电荷1 SZP和电荷2 SZP。使用负电子束抗蚀剂氢倍半硅氧烷氢（HSQ）进行构图，并在带区板上电镀镍。然后将这些波带片用作软X射线显微镜设置中的成像光学元件。

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