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首页> 外文会议>Conference on Emerging Lithographic Technologies VIII pt.2; 20040224-20040226; Santa Clara,CA; US >Plasticizer-assisted polymer imprint and transfer
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Plasticizer-assisted polymer imprint and transfer

机译：增塑剂辅助的聚合物压印和转移

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We have developed a new method to pattern polymeric materials, including non-thermoplastic polymers, at low temperature and low pressure. In this method, plasticizers are added to increase the chain mobility of the polymers, resulting in lower imprinting temperature and/or pressure. Two established imprinting and transfer techniques were chosen to demonstrate this method, namely, conventional nanoimprint lithography (NIL) and microcontact printing (μCP). These two techniques were used to pattern poly(3,4-ethylenedioxythiophene) (PEDOT). PEDOT was chosen because it is a non-thermoplastic polymer and therefore cannot be easily patterned using conventional NIL. Successful imprint of PEDOT films from the PDMS mold was achieved at a low pressure of 10 kPa and 25℃ by controlled addition of glycerol as a plasticizer using conventional NIL; well-defined arrays of 2 μm wide, 185 nm high PEDOT dots have also been demonstrated by μCP. In contrast, patterning of PEDOT film without plasticizer requires higher temperature (80℃) and pressure (10 MPa), which could cause severe deformation of the transferred patterns. This method of plasticizer-assisted imprint lithography (PAIL) broadens the applicapability of NIL to a wide range of polymeric materials.
机译：我们已经开发出一种在低温和低压下对包括非热塑性聚合物在内的聚合物材料进行构图的新方法。在这种方法中，添加了增塑剂以增加聚合物的链迁移率，从而降低了压印温度和/或压力。选择了两种已建立的压印和转移技术来证明该方法，即常规的纳米压印光刻（NIL）和微接触印刷（μCP）。这两种技术用于对聚（3,4-亚乙二氧基噻吩）（PEDOT）进行图案化。选择PEDOT是因为它是非热塑性聚合物，因此无法使用常规NIL轻松进行图案化。通过使用传统的NIL受控添加甘油作为增塑剂，在10 kPa的低压和25℃的压力下，成功地从PDMS模具上成功印制了PEDOT膜。 μCP还证明了2毫米宽，185纳米高的PEDOT点的定义明确的阵列。相反，在不使用增塑剂的情况下对PEDOT膜进行构图需要较高的温度（80℃）和压力（10 MPa），这可能会导致转印图案的严重变形。这种增塑剂辅助压印平版印刷术（PAIL）的方法将NIL的适用性扩展到了广泛的聚合物材料。

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