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首页> 外文会议>Conference on Emerging Lithographic Technologies VIII pt.2; 20040224-20040226; Santa Clara,CA; US >Silanised polymeric working stamps for hot embossing lithography
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Silanised polymeric working stamps for hot embossing lithography

机译：硅烷化的聚合物工作印模，用于热压印光刻

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摘要

Pattern replication into curable imprint resists by hot embossing offers the opportunity to use the replication after cross-linking as a working-stamp. The replications of a 4,, Si stamp into the thermoset imprint polymer mr-I 9000R-XP with a commercial hot embossing system (EVGroup) have been coated with an anti-adhesive layer (trichlorosilane) from the gas-phase at ambient pressure. The investigation of the quality and durability of these anti-adhesive coatings reveals that the contact angles and the replication performance of the working-stamps were independent from the fact whether the polymer was already cured or still thermoplastic during the anti-adhesive coating. The prepared 4,, working-stamps themselves have been successfully replicated into a low glass transition temperature resist (mr-L 6000.5 XP) and into PMMA.
机译：通过热压纹将图案复制到可固化的压印抗蚀剂中，提供了将交联后的复制品用作工作印章的机会。将具有工业热压印系统（EVGroup）的4，Si压模复制到热固性压印聚合物mr-I 9000R-XP中，已在环境压力下从气相中涂覆了防粘层（三氯硅烷）。对这些防粘涂层的质量和耐久性的研究表明，工作角的接触角和复制性能与以下事实无关，即在防粘涂层中聚合物是否已经固化或仍是热塑性的。制备好的4个工作印章本身已成功复制到低玻璃化温度的抗蚀剂（mr-L 6000.5 XP）和PMMA中。

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