Experimental study on basic properties of laser-produced EUV plasmas on GEKKO-XII laser facility

机译：GEKKO-XII激光设备上激光产生的EUV等离子体基本特性的实验研究

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Extremely ultraviolet (EUV) light at around 13.5 nm of wavelength is the most probable candidate of the light source for lithography for semiconductors of next generation. We have been studying about the EUV light source from laser-produced plasma. Detailed understanding of the EUV plasma is required for developments of modeling with simulation codes. Several parameters should be experimentally measured to develop the important issues in the simulation codes. We focused on density profile, properties of EUV emission, and opacity of the laser-produced plasmas. We present recent experimental results on these basic properties of the laser-produced EUV plasmas.

机译：波长约为13.5 nm的极紫外（EUV）光是下一代半导体光刻技术的最有可能的候选光源。我们一直在研究激光产生的等离子体产生的EUV光源。开发带有仿真代码的模型需要对EUV等离子体有详细的了解。应该对几个参数进行实验测量，以开发出仿真代码中的重要问题。我们关注密度分布，EUV发射的特性以及激光产生的等离子体的不透明度。我们目前对激光产生的EUV等离子体的这些基本特性的实验结果。

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来源
《Conference on Emerging Lithographic Technologies VIII pt.2; 20040224-20040226; Santa Clara,CA; US》|2004年|P.971-978|共8页
会议地点 Santa Clara CA(US)
作者
Keisuke Shigemori; Mitsuo Nakai; Yoshinori Shimada; Michiteru Yamaura; Kazuhisa Hashimoto; Shinsuke Fujioka; Hiroaki Nishimura; Shigeaki Uchida; Atsushi Sunahara; Katsunobu Nishihara; Noriaki Miyanaga; Yasukazu Izawa;
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作者单位

Institute of Laser Engineering, Osaka University, Suita, Osaka 565-0871, Japan;

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原文格式 PDF
正文语种 eng
中图分类半导体技术;
关键词
EUV source; laser-produced plasma; plasma density profile; opacity;

机译：EUV源；激光产生的血浆；血浆密度分布；不透明度;

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1. Experimental and theoretical investigation of radiation and dynamics properties in laser-produced carbon plasmas [J] . Min Qi, Su Maogen, Wang Bo, Journal of Quantitative Spectroscopy & Radiative Transfer . 2018,第期

机译：激光生产碳等离子体辐射和动力学特性的实验与理论研究
2. Experimental studies of emission of highly charged Au-ions and of X-rays from the laser-produced plasma at high laser intensities [J] . L. Láska, S. Cavallaro, K. Jungwirth, The European physical journal, D. Atomic, molecular, and optical physics . 2009,第2期

机译：在高激光强度下从激光产生的等离子体发射高电荷的Au离子和X射线的实验研究
3. Experimental studies of generation of __ 100 MeV Au-ions from the laser-produced plasma [J] . L.L_SKA, J. KR_SA, A. VELYHAN, Laser and Particle Beams . 2009,第1期

机译：激光产生等离子体产生__ 100 MeV Au离子的实验研究
4. Study on EUV emission properties of laser-produced plasma at ILE, Osaka [C] . Mitsuo Nakai, Hiroaki Nishimura, Keisuke Shigemori, Conference on laser-generated and other laboratory x-ray and EUV sources, optics, and applications . 2004

机译：激光生产等离子体EUV排放性能研究ILE，大阪
5. Experiments on laser-produced plasmas and laser plasma-wall interactions. [D] . Wang, Quan. 2001

机译：激光产生等离子体和激光等离子体-壁相互作用的实验。
6. Evolution analysis of EUV radiation from laser-produced tin plasmas based on a radiation hydrodynamics model [O] . M. G. Su, Q. Min, S. Q. Cao, -1

机译：基于辐射流体动力学模型的激光产生锡等离子体的EUV辐射演化分析
7. Experimental studies of fast electron generation in laser-produced plasmas at 1.06, 0.53 and 0.26 μm laser wavelength [O] . F. Amiranoff, R. Fabbro, E. Fabre, 1982

机译：在1.06,0.53和0.26μm激光波长的激光产生等离子体中快速电子产生的实验研究
8. Heights integrated model as instrument for simulation of hydrodynamic, radiation transport, and heat conduction phenomena of laser-produced plasma in EUV applications. [R] . 2007

机译：高度集成模型作为用于模拟EUV应用中激光产生的等离子体的流体动力学，辐射传输和热传导现象的仪器。

Experimental study on basic properties of laser-produced EUV plasmas on GEKKO-XII laser facility

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