LIGA Fabricated Two-Dimensional Quadrupole Array and Scroll Pump for Miniature Gas Chromatograph/ Mass Spectrometer

机译：LIGA制造的二维四极杆阵列和涡旋泵，用于微型气相色谱仪/质谱仪

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A 3X3 array of hyperboloid quadrupole mass filters with a 3 mm pole length was fabricated using the LIGA (Lithographie, Galvanoformung and Abformung) process. Electrical connectivity and spatial orientation are established by bonding the pole array to a low temperature co-fired ceramic (LTCC) substrate. A miniature scroll pump for vacuum pumping with a scroll height of 3 mm was also fabricated using the LIGA process. New LIGA fabrication steps (e.g. expose and developed freestanding PMMA, compression bonding of electroplating base and PMMA, low-stress electroplated films) have been developed to fabricate ultra thick PMMA molds with high aspect ratios (70:1) and high precision. Computational analysis was performed to estimate the miniature scroll pump performance characteristics.

机译：使用LIGA（Lithographie，Galvanoformung和Abformung）工艺制造了3x3极长3mm的双曲面四极质量过滤器阵列。通过将极点阵列粘合到低温共烧陶瓷（LTCC）基板来建立电连接性和空间方向。还使用LIGA工艺制造了具有3mm的涡旋高度的用于真空泵送的微型涡旋泵。已经开发出新的LIGA制造步骤（例如，暴露和开发独立的PMMA，电镀基底和PMMA的压缩结合，低应力电镀膜）以制造具有高纵横比（70：1）和高精度的超厚PMMA模具。进行了计算分析以估计微型涡旋泵的性能特征。

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来源
《Conference on First Jet Propulsion Laboratory in Situ Instruments Workshop Jun 11-13, 2002 Pasadena, California, USA》|2002年|p.8-13|共6页
会议地点 Pasadena CA(US);Pasadena CA(US)
作者
Dean Wiberg; Nosang V. Myung; Beverley Eyre; kirill Shcheglov; Otto Oreint; Eric Moore; Philip Munz;
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作者单位

MEMS Technology Group, Jet Propulsion Laboratory California Institute of Technology;

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会议组织
原文格式 PDF
正文语种 eng
中图分类航空;
关键词
miniature gas chromatograph; miniature mass spectrometer; LIGA; electroplating; scroll pump; low temperature co-fired ceramic;

机译：微型气相色谱仪微型质谱仪LIGA电镀滚动泵低温共烧陶瓷;

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LIGA Fabricated Two-Dimensional Quadrupole Array and Scroll Pump for Miniature Gas Chromatograph/ Mass Spectrometer

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