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首页> 外文会议>Conference on Infrared Technology and Applications XXVII Apr 16-20, 2001, Orlando, USA >Semiconducting YBaCuO microbolometers for uncooled broad-band IR sensing
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Semiconducting YBaCuO microbolometers for uncooled broad-band IR sensing

机译：YBaCuO半导体微辐射热计，用于非冷却宽带红外传感

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摘要

This paper describes the modeling, design, fabrication and testing of advanced uncooled thermal detectors, based on semiconducting YBaCuO. The aim is to provide NASA with advanced broad-band infrared (IR) detectors to replace the current CERES (Clouds and the Earth's Radiant Energy System) hardware that utilizes three channels, each housing a 1.5 mmXl.5 mm thermister bolometer with 1X4 array of detectors in each of the three channels, thus yielding a total of 12 channels. A double mirror structure is used to obtain uniform spectral response from 0.3-100μm wavelength. Double absorbers are utilized to further flatten the spectral response and to enhance the absorption of infrared radiation. The devices were fabricated using a polyimide sacrificial layer to achieve thermal isolation of the detector. A low thermal conductivity to the substrate enables the detector to integrate the energy from the incident radiation. An air gap was created by ashing the polyimide sacrificial layer from underneath the thermometer. A passivation layer was used to protect YBaCuO during ashing process and maintain a relatively high temperature coefficient of resistance of around 2.8%. These devices have successfully demonstrated voltage responsivities over 10~3 V/W, detectivities above 10~8 cm Hz~(1/2)/W, NEP per root Hertz bandwidth less than 4Xl0~(-10) W/Hz~(1/2) and thermal time constant less than 15 ms. Several specific designs were fabricated and tested. Relatively uniform response in the wavelength range of 0.6 to 15μm was measured.
机译：本文介绍了基于半导体YBaCuO的高级非冷却热探测器的建模，设计，制造和测试。目的是为NASA提供先进的宽带红外（IR）探测器，以取代利用三个通道的当前CERES（云和地球的辐射能系统）硬件，每个硬件装有一个1.5mmX1.5mm的热辐射测辐射热计，带有1X4阵列在三个通道中的每个通道中安装检测器，因此总共产生12个通道。使用双镜结构从0.3-100μm波长获得均匀的光谱响应。利用双吸收器进一步平坦化光谱响应并增强红外辐射的吸收。使用聚酰亚胺牺牲层制造器件，以实现探测器的热隔离。基材的低导热性使检测器能够整合入射辐射的能量。通过将温度计下方的聚酰亚胺牺牲层灰化来形成气隙。钝化层用于在灰化过程中保护YBaCuO，并保持约2.8％的较高电阻温度系数。这些设备已经成功证明了电压响应超过10〜3 V / W，探测灵敏度超过10〜8 cm Hz〜（1/2）/ W，每根赫兹带宽的NEP小于4X10〜（-10）W / Hz〜（1 / 2），并且热时间常数小于15 ms。制作并测试了几种特定的设计。在0.6至15μm的波长范围内测得相对均匀的响应。

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