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首页> 外文会议>Conference on Infrared Technology and Applications XXVII Apr 16-20, 2001, Orlando, USA >High-resolution pyroelectric linear arrays based on LiTaO_3
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High-resolution pyroelectric linear arrays based on LiTaO_3

机译：基于LiTaO_3的高分辨率热释电线性阵列

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摘要

Lithium tantalate ( LiTaO_3) is a material that is excellently suited for pyroelectric infrared detectors. Its figures of merit are first rate, it has a good long-time stability and it is available at reasonable cost. Researchers at the Institute for Solid State Electronics have been developing a flexible technology to manufacture LiTaO_3 detectors for the last twelve years. As a result, devices can be produced that can be optimally adjusted to the planned application. This paper describes the design and basic features of linear arrays with up to 256 responsive elements. The arrays are hybrid devices consisting of the pyroelectric chip and a CMOS multiplexer. It is demonstrated that special patterning technologies (ion beam etching) and optical functional layers on the responsive element considerably increase the thermal and spatial resolution. Thus, NEP values smaller than 0.2 nW were obtained at 40 Hz chopper frequency. Main applications of detectors are the contactless temperature measurement and - increasingly - the spectrometry in the wavelength range 0.8....25 μm.
机译：钽酸锂（LiTaO_3）是非常适合热释电红外探测器的材料。它的优点是一流的，具有良好的长期稳定性，并且价格合理。在过去的十二年中，固态电子研究所的研究人员一直在开发一种灵活的技术来制造LiTaO_3探测器。结果，可以生产出可以针对计划的应用进行最佳调整的设备。本文介绍了具有多达256个响应元件的线性阵列的设计和基本特征。阵列是由热电芯片和CMOS多路复用器组成的混合设备。结果表明，特殊的构图技术（离子束蚀刻）和响应元件上的光学功能层大大提高了热分辨率和空间分辨率。因此，在40Hz斩波频率下获得小于0.2nW的NEP值。探测器的主要应用是非接触式温度测量以及波长范围为0.8 .... 25μm的光谱仪。

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