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首页> 外文会议>Annual International Symposium on Aerospace/Defense Sensing, Simulation and Controls >High-resolution pyroelectric linear arrays based on LiTaO{sub}3
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High-resolution pyroelectric linear arrays based on LiTaO{sub}3

机译：基于Liao {Sub} 3的高分辨率热电线性阵列

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Lithium tantalate (LiTaO{sub}3) is a material that is excellently suited for pyroelectric infrared detectors. Its figures of merit are first rate, it has a good long-time stability and it is available at reasonable cost. Researchers at the Institute for Solid State Electronics have been developing a flexible technology to manufacture LiTaO{sub}3 detectors for the last twelve years. As a result, devices can be produced that can be optimally adjusted to the planned application. This paper describes the design and basic features of linear arrays with up to 256 responsive elements. The arrays are hybrid devices consisting of the pyroelectric chip and a CMOS multiplexer. It is demonstrated that special patterning technologies (ion beam etching) and optical functional layers on the responsive element considerably increase the thermal and spatial resolution. Thus, NEP values smaller than 0.2 nW were obtained at 40 Hz chopper frequency. Main applications of detectors are the contactless temperature measurement and - increasingly - the spectrometry m the wavelength range 0.8....25μm.
机译：钽酸锂（LiTao {Sub} 3）是一种极其适用于热电红外探测器的材料。它的优异数据是第一率，它具有良好的长期稳定性，可以合理的成本提供。固态电子研究所的研究人员一直在开发一种灵活的技术来制造Liao {Sub} 3探测器的最近十二年。结果，可以制造设备可以最佳地调整到计划的应用程序。本文介绍了线性阵列的设计和基本特征，最多可响应于256个响应元素。阵列是由热电芯片和CMOS多路复用器组成的混合装置。据证明，响应元件上的特殊图案化技术（离子束蚀刻）和光学功能层显着增加了热和空间分辨率。因此，在40Hz斩波频率下获得小于0.2NW的NEP值。探测器的主要应用是非接触式温度测量和 - 越来越多的波长范围0.8 ....25μm。

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