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首页> 外文会议>Conference on Integrated Optics: Devices, Materials, and Technologies Ⅵ Jan 21-23, 2002 San Jose, USA >Temperature sensitivity of UV-induced Bragg gratings in silica-based waveguides on crystallized glass substrate
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Temperature sensitivity of UV-induced Bragg gratings in silica-based waveguides on crystallized glass substrate

机译：结晶玻璃基板上石英基波导中紫外线诱导的布拉格光栅的温度敏感性

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摘要

We have fabricated silica-based waveguide Bragg grating devices and have investigated temperature sensitivity of the Bragg wavelengths. Temperature sensitivity of Bragg wavelength is caused by temperature dependence of effective refractive index and thermal expansion. We examined boron-codoped germanosilicate glasses as waveguide materials in order to decrease a temperature sensitivity of refractive index. The boron-codoped germanosilicate films were fabricated by a plasma enhanced chemical vapor deposition. We adopted Si, silica, and crystallized glass as substrates in order to control the thermal expansion of the waveguides. Bragg grating with 0.53 μm period was formed by irradiation with a KrF excimer laser light through a phase mask. The Bragg wavelength shift of 9.7pm/℃ was obtained in the B-Ge-SiO_2 core waveguide on a silica substrate, while the Bragg wavelength shift was 11pm/℃ in the with Ge-SiO_2 core waveguide on a Si substrate, which was a conventional-type waveguide Bragg grating device. The Bragg wavelength shift was reduced to 7.8pm/℃ by using B-Ge-SiO_2 core and a crystallized glass substrate with zero thermal expansion coefficient, which was 2/3 of the value of the conventional waveguide Bragg grating device.
机译：我们已经制造了基于二氧化硅的波导布拉格光栅器件，并研究了布拉格波长的温度敏感性。布拉格波长的温度敏感性是由有效折射率和热膨胀的温度依赖性引起的。为了降低折射率的温度敏感性，我们研究了硼掺杂的锗硅酸盐玻璃作为波导材料。硼掺杂的锗硅酸盐薄膜是通过等离子体增强化学气相沉积法制备的。为了控制波导的热膨胀，我们采用了硅，二氧化硅和结晶玻璃作为衬底。通过相位掩模用KrF准分子激光照射，形成周期为0.53μm的布拉格光栅。在二氧化硅衬底上的B-Ge-SiO_2核心波导中，布拉格波长偏移为9.7pm /℃，而在硅衬底上的Ge-SiO_2核心波导中，布拉格波长偏移为11pm/℃。传统型波导布拉格光栅装置。通过使用B-Ge-SiO_2核和热膨胀系数为零的结晶玻璃基板，布拉格波长偏移降低到7.8pm /℃，这是常规波导布拉格光栅装置的值的2/3。

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