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首页> 外文会议>Conference on Interferometry XI: Applications, Jul 10-11, 2002, Seattle, USA >Ultrasonic displacement measurement using self-mixing interferometry
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Ultrasonic displacement measurement using self-mixing interferometry

机译：使用自混合干涉仪进行超声波位移测量

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摘要

We describe a method for the ultrasonic displacement measurement in a small volume based on self-mixing effect in a laser diode. The interference signal (mode-hop signal) is modulated with injection variation and demodulated by signal analysis. The interference signal due to the vibration of a testing example under the ultrasonic excitation is used for a determination of the sound displacement. Self-mixing interferometer is used, because it is much simper than the conventional interferometers. Many optical elements like the beamsplitter, reference mirror, and external photodetector are not required. Theoretical analysis and experimental method are presented. The vibration of a PZT transducer―driven sample was measured with resolution of sub-micron.
机译：我们描述了一种基于激光二极管中自混合效应的小体积超声波位移测量方法。干扰信号（跳模信号）通过注入变化进行调制，并通过信号分析进行解调。由在超声波激励下的测试例的振动引起的干扰信号被用于确定声音位移。使用自混合干涉仪，因为它比传统干涉仪简单得多。不需要许多光学元件，例如分束器，参考镜和外部光电探测器。提出了理论分析和实验方法。 PZT换能器驱动的样品的振动以亚微米分辨率测量。

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