首页> 外文会议>Conference on laser applications in microelectronic and optoelectronic manufacturing VII; 20090126-29; San Jose, CA(US) >Generation of nano-structured surfaces by interfering and no-interfering ultra-short pulse laser processing
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Generation of nano-structured surfaces by interfering and no-interfering ultra-short pulse laser processing

机译:通过干扰和无干扰的超短脉冲激光加工产生纳米结构表面

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摘要

Top down technology of ultra-short pulse laser processing was applied to induce liquidly process and generate new nanostructures such as nano-waterdrop, nanocrown, and fine web structure. For example, a nano-waterdrop was generated by a single shot ps laser irradiation and had the narrow dieter of about 50 nm. In the case of nanocrown, whiskers were standing at the edge of a nanohole, and the diameter of the whiskers was around 100 nm. In addition, wavelength-sized web structure was generated in a single shot of femtosecond laser irradiation.
机译:自上而下的超短脉冲激光加工技术被应用于诱导液体加工并产生新的纳米结构,例如纳米水滴,纳米冠和精细的网状结构。例如,纳米水滴是通过单次ps激光照射产生的,并且具有约50 nm的窄节食器。在纳米冠的情况下,晶须位于纳米孔的边缘,且晶须的直径约为100 nm。另外,在一次飞秒激光辐照中产生了波长大小的纤维网结构。

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