Lithographic fabrication of microstructures by laser ablation using femtosecond laser

机译：飞秒激光通过激光烧蚀进行微结构光刻制造

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Photo-lithographical laser ablation was demonstrated by laser ablation using a femtosecond laser system with a lithographic optical system. Among them, laser beam passed through a mask and the pattern was imaged on the film by a pair of convex lenses. As a result, the film was lithographically ablated, and micron-sized patterns were generated in a single shot. Fringes were generated outside the ablated patterns with defocusing or larger laser fluence. The resolution of generation was 13 μm, and the narrowest width of a generated line was about 4 μm. In addition, transmission gratings were used instead of a mask, and nano-sized periodic structures were generated.

机译：使用具有平版印刷光学系统的飞秒激光系统通过激光烧蚀演示了光刻激光烧蚀。其中，激光束穿过掩模，并且图案通过一对凸透镜在胶片上成像。结果，该膜被光刻消融，并且一次拍摄就产生了微米尺寸的图案。在散焦图案外产生散焦或散焦或较大的激光通量。产生的分辨率为13μm，产生的线的最窄宽度为约4μm。另外，使用透射光栅代替掩模，并且产生纳米级的周期性结构。

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《Conference on Laser-Assisted Micro- and Nanotechnologies 2003; Jun 29-Jul 3, 2003; St. Petersburg, Russia》|2003年|p.147-155|共9页
会议地点 St. Petersburg(RU);St. Petersburg(RU);St. Petersburg(RU);St. Petersburg(RU);St. Petersburg(RU);St. Petersburg(RU);St. Petersburg(RU);St. Petersburg(RU)
作者
Yoshiki Nakata; Tatsuo Okada; Mitsuo Maeda;
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作者单位

Graduate School of Information Science and Electrical Engineering, Kyushu University, 6-10-1 Hakozaki, Fukuoka 812-8581, Japan;

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会议组织
原文格式 PDF
正文语种 eng
中图分类无线电电子学、电信技术;
关键词
femtosecond laser; laser ablation; lithography; thin film; interference; transfer of mask;

机译：飞秒激光;激光烧蚀;光刻;薄膜;干涉;掩膜转移;

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1. Lithographical laser ablation using femtosecond laser [J] . Y. NAKATA, T. OKADA, M. MAEDA Applied Physics. A, Materials Science & Processing . 2004,第4a6期

机译：飞秒激光平版印刷激光烧蚀
2. Fabrication of antireflection microstructures on the surface of GaSe crystal by single-pulse femtosecond laser ablation [J] . Bushunov Andrey A., Teslenko Andrei A., Tarabrin Mikhail K., Optics Letters . 2020,第21期

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3. Hierarchical microstructures with high spatial frequency laser induced periodic surface structures possessing different orientations created by femtosecond laser ablation of silicon in liquids [J] . Dongshi Zhang, Koji Sugioka 光电进展（英文版） . 2019,第003期

机译：飞秒激光烧蚀液体中的硅产生的具有高空间频率激光诱导的周期性表面结构的分层微结构具有不同的取向
4. Lithographic fabrication of microstructures by laser ablation using femtosecond laser [C] . Yoshiki Nakata, Tatsuo Okada, Mitsuo Maeda International conference on laser-assisted micro- and nanotechnologies . 2003

机译：飞秒激光激光烧蚀光学制造微观结构
5. Machining of Novel Devices with 3D Microstructures in Bulk Materials by Femtosecond Pulsed Laser Ablation [D] . Huang, Yinggang. 2017

机译：飞秒脉冲激光烧蚀加工散装材料中具有3D微结构的新型设备
6. Fabrication of Periodic Nanostructures on Silicon Suboxide Films with Plasmonic Near-Field Ablation Induced by Low-Fluence Femtosecond Laser Pulses [O] . Tatsuyoshi Takaya, Godai Miyaji, Issei Takahashi, 2020

机译：低流量小飞秒激光脉冲诱导等离子体近场消融硅基氧化膜周期纳米结构的制备
7. Ablation of solids by femtosecond lasers: ablation mechanism and ablation thresholds for metals and dielectrics [O] . Gamaly, E. G., Rode, A. V., Tikhonchuk, V. T., 2001

机译：飞秒激光烧蚀固体：消融机制和消融金属和电介质的烧蚀阈值
8. Ultraviolet Femtosecond and Nanosecond Laser Ablation of Silicon: Ablation Efficiency and Laser-Induced Plasma Expansion [R] . Zong, X., Mao, X., Greif, R., 2005

机译：紫外飞秒和纳秒激光烧蚀硅：烧蚀效率和激光诱导等离子体膨胀

Lithographic fabrication of microstructures by laser ablation using femtosecond laser

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