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Emission Reduction of Perfluorocompounds in Semiconductor Manufacturers via Capture and Recycle

机译：通过捕获和回收减少半导体制造商中的全氟化合物排放

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Although uncertainty exists about exactly how the earth's climate responds to increased concentration of gases with global warming potential, global temperatures are rising. All of the global warming gases emitted will persist in the atmosphere for several human generations. As such, action should be taken to address emission reductions when ever feasible. Although there is no magic bullet for complete reduction, there are several strategies for the emission reduction of the most potent global warming gases, namely, PFCs. This includes process chemistry alteration, process improvement, recycling and abatement. Process chemistry alteration is a long-term option and it can not address the immediate goal of emission reduction. Treatment and abatement technology is commercially mature, but it does not address the roots of the pollution problem. It transforms a global warming issue into a hazardous waste management problem, and is expensive to operate because it requires external energy input in the form of fuel and/or electricity. Both process improvement and PFC recycling lead to an increased rate of the raw PFCs material utilization. They are valuable strategies because they benefit both industry and society by overall reduction in PFC emissions. Membrane-based PFC capture/recycle systems are well suited for capturing and concentrating highly diluted PFCs from manufacturing exhaust lines. Among the PFCs, the capture efficiency for SF_6, CF_4 and C_2F_6 exceeds 98%, and at the same time, the system can concentrate these gases from a few ppm to more than 99%.
机译：尽管目前尚不确定地球气候如何响应全球变暖潜能增加的气体浓度，但全球气温仍在上升。所有排放的全球变暖气体将在大气中持续存在几代人。因此，应在可行的情况下采取措施解决减排问题。尽管没有完全减排的灵丹妙药，但是有几种策略可以减少最有效的全球变暖气体，即PFC。这包括工艺化学变更，工艺改进，回收和减排。工艺化学改变是一个长期的选择，它不能解决减排的近期目标。处理和减排技术在商业上已经成熟，但是它并未解决污染问题的根源。它将全球变暖问题转化为有害废物管理问题，并且操作昂贵，因为它需要以燃料和/或电力的形式输入外部能量。工艺的改进和PFC的回收都导致原料PFC原料利用率的提高。它们是有价值的策略，因为它们通过总体上减少PFC排放量使行业和社会受益。基于膜的PFC捕集/再循环系统非常适合从生产的排气管线中捕集和浓缩高度稀释的PFC。在PFC中，SF_6，CF_4和C_2F_6的捕获效率超过98％，同时，系统可以将这些气体的浓度从几ppm提高到99％以上。

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