• 主题
高级搜索  >
历史搜索 清空历史
首页> 外文会议>Conference on Optical Design and Testing; 20071112-15; Beijing(CN) >Evaluation of the sphericity measurement uncertainty for the fiber point diffraction interferometer
【24h】

Evaluation of the sphericity measurement uncertainty for the fiber point diffraction interferometer

机译：光纤点衍射干涉仪的球形度测量不确定度评估

获取原文
获取原文并翻译 | 示例
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

Due to the imperfectness of the reference wavefront produced by standard lens, the spherical figure measurement precision of the traditional interferometer is limited. The fiber point diffraction interferometer (FPDI) provides a method to produce the nearly perfect reference wavefront for the spherical figure measurement. The diverging wavefront diffracting from the fiber tip can serve as an ideal reference for the concave spherical surface measurement. However, it can not serve for the convex surface measurement until an auxiliary positive lens is introduced. This paper presents the different FPDI configurations for the concave and convex spherical surface measurement. The measurement uncertainty of the FPDI comes from the following factors: the spherical figure error of the reference wavefront diffracting from the fiber tips; the flatness of the fiber tips; the phase shifting error of PZT; the tilting error introduced by adjustment during measurement; the environmental influences such as temperature, vibration, and air turbulence. In all of these factors, the flatness of the fiber tips mostly affects the measurement uncertainty. The estimation of the expanded uncertainty is about λ/95 for the concave and λ/40 (λ=532nm) for the convex spherical figure measurement by FPDI.
机译：由于标准透镜产生的参考波前不完善，传统干涉仪的球面图测量精度受到限制。光纤点衍射干涉仪（FPDI）提供了一种为球面图形测量生成近乎完美的参考波前的方法。来自光纤尖端的发散波前衍射可以作为凹球面测量的理想参考。但是，在引入辅助正透镜之前，它不能用于凸面测量。本文介绍了用于凹凸球面测量的不同FPDI配置。 FPDI的测量不确定性来自以下因素：从光纤尖端衍射的参考波前的球面图误差；纤维尖端的平坦度； PZT的相移误差；测量过程中由于调整而引起的倾斜误差；环境影响，例如温度，振动和空气湍流。在所有这些因素中，光纤尖端的平坦度主要影响测量不确定度。通过FPDI测量，对于凹面，扩展不确定度的估计约为λ/ 95，对于凸球面图形，约为λ/ 40（λ= 532nm）。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号