首页> 外文会议>Conference on Optical Micro- and Nanometrology in Manufacturing Technology; 20040429-20040430; Strasbourg; FR >Interferometric methods for static and dynamic characterizations of micromembranes for sensing functions
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Interferometric methods for static and dynamic characterizations of micromembranes for sensing functions

机译:用于感测功能的微膜静态和动态表征的干涉法

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摘要

We present a methodology for static and dynamic testing of mechanical properties of microelements. The measurement path includes temporal phase shifting interferometry for quantitative static shape elements analysis. This is followed by determination of the resonance frequency by means of modified time average interferometry and transient amplitude and phase maps of vibrating micromembrane capturing and evaluation by phase shifting stroboscopic interferometry. Proper application of combination of these methods allows for quick and accurate analysis of micromembranes and optimization of their manufacturing conditions.
机译:我们提出了一种静态和动态测试微量元素机械性能的方法。测量路径包括用于定量静态形状元素分析的时间相移干涉术。然后,通过修改的时间平均干涉法以及通过相移频闪干涉法进行振动微膜捕获和评估的瞬态振幅和相位图,确定共振频率。适当组合使用这些方法可以快速而准确地分析微膜并优化其制造条件。

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