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首页> 外文会议>Conference on Optical Micro- and Nanometrology in Manufacturing Technology; 20040429-20040430; Strasbourg; FR >Investigation on mechanical properties of porous alumina thin membranes using temporal sequence speckle pattern interferometry
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Investigation on mechanical properties of porous alumina thin membranes using temporal sequence speckle pattern interferometry

机译：时间序列散斑图干涉法研究多孔氧化铝薄膜的力学性能

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摘要

Porous alumina thin membranes containing parallel regular pores of uniform size (nano scale) and normal to substrate surface have been prepared and fabricated. Their fine pore structure has recently made the porous films to be one of the ideal templates for synthesis of nano-structured materials and MEMS (micro-electro-mechanical systems) and separator for separation those small grains from mixed liquid. Unfortunately, the significant macro-mechanical properties of porous alumina thin membrane have not yet been understood clearly. Because the geometry of this kind membrane is multi-scale covered with mm to μm to nm, macro-mechanical behaviors of the porous alumina thin membranes belong to nonlinear mechanics. To measure and calculate those mechanical properties are difficult. Using "temporal speckle pattern interferometry" to measure successfully the large deflection vs perpendicular uniform pressure. Then the mechanical properties of the porous alumina membranes, such as elastic modulus and fracture strength, can be obtained based on plate/shell models and flexile thin membrane model. The results indicate unusual mechanical behavior of it and help us to understand the relations between microstructure and macro mechanical properties.
机译：已经制备并制造了包含均匀尺寸（纳米级）且平行于基材表面的平行规则孔的多孔氧化铝薄膜。最近，它们的细孔结构使多孔膜成为合成纳米结构材料和MEMS（微机电系统）的理想模板之一，并成为从混合液体中分离出这些小颗粒的分离器。不幸的是，多孔氧化铝薄膜的显着宏观力学性能尚未清楚地理解。由于这种膜的几何形状是多尺度的，覆盖了毫米到微米到纳米，因此多孔氧化铝薄膜的宏观力学行为属于非线性力学。测量和计算那些机械性能是困难的。使用“时间散斑图干涉法”成功测量相对于垂直均匀压力的大挠度。然后，基于板/壳模型和挠性薄膜模型，可以获得多孔氧化铝膜的机械性能，例如弹性模量和断裂强度。结果表明它具有异常的力学行为，并有助于我们理解微观结构与宏观力学性能之间的关系。

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