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首页> 外文会议>Conference on Optical Microlithography XV Pt.2, Mar 5-8, 2002, Santa Clara, USA >Self calibration of wafer scanners using aerial image sensor
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Self calibration of wafer scanners using aerial image sensor

机译：使用航拍图像传感器对晶圆扫描仪进行自我校准

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摘要

To improve both the versatility and stability of leading edge wafer scanners, the functionality of an integrated aerial image sensor has been expanded. The system performance of current wafer scanners is a strong function of the quality of image formation of the projection lens. Current wafer scanners use aerial image sensors for best image plane calibration, illumination telecentricity calibration, coma aberration calibration, and distortion calibration. The aerial image sensor is used not only for a scanner's self- calibration but also during the projection lens manufacturing purposes. The slit-scan type aerial image sensor is used for measurement of the intensity distribution of the aerial images. This type of the image sensor can detect the intensity distribution of the aerial image from HOnm L/ S to 6μm L/ S. Therefore this aerial image sensor covers most aerial image measurement requirements. In this paper we will focus on the aerial image measurement for self-calibration purposes and their actual performances. We evaluate the actual performance of illumination telecentricity and coma aberration measurement. Evaluation is based upon not only measurement repeatability but also its agreement with resist image measurement results.
机译：为了提高前沿晶圆扫描仪的多功能性和稳定性，集成了航拍图像传感器的功能已得到扩展。当前的晶片扫描仪的系统性能是投影透镜的图像形成质量的重要函数。当前的晶圆扫描仪将航空图像传感器用于最佳图像平面校准，照明远心校准，彗形像差校准和畸变校准。航拍图像传感器不仅用于扫描仪的自校准，而且在投影透镜制造过程中使用。狭缝扫描型航空图像传感器用于测量航空图像的强度分布。这种类型的图像传感器可以检测从HOnm L / S到6μmL / S的航空图像的强度分布。因此，该航空图像传感器满足大多数航空图像测量要求。在本文中，我们将专注于出于自校准目的的航空图像测量及其实际性能。我们评估照明远心度和彗形像差测量的实际性能。评价不仅基于测量的可重复性，还基于其与抗蚀剂图像测量结果的一致性。

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