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首页> 外文会议>Conference on Optical Microlithography XV Pt.2, Mar 5-8, 2002, Santa Clara, USA >Spectral Metrologies for Ultra-Line-Narrowed F_2 laser
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Spectral Metrologies for Ultra-Line-Narrowed F_2 laser

机译：超窄行F_2激光的光谱计量

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摘要

The roadmap of semiconductor fabrication predicts that the semiconductor market will demand 65nm node devices from 2004/2005. Therefore, an Ultra-Line-Narrowed F_2 laser for dioptric projection systems is being developed under the ASET project "The F_2 Laser Lithography Development Project". The target of this project is to achieve a F_2 laser spectral bandwidth below 0.2pm (FWHM) and an average power of 25W at a repetition rate of 5 kHz. Accurate measurements of the laser spectrum and of the laser wavelength stability are therefore very important. We therefore developed a VUV wavemeter with a Br-lamp to measure the absolute F_2 laser wavelength. We obtained 157.631nm for the main F_2 laser transition using the Br-lamp reference lines at 157.4840nm and 157.6385nm, We have also developed a VUV high-resolution spectrometer to measure spectral profiles, which was calibrated by 157nm coherent light source (157CLS). The 157CLS is a very narrow line-width, which can be approximated by delta function. The 157CLS had a line-width of 0.008pm(Full-Width-At-Half-Maximum, FWHM) and a power of 0.1mW. The instrument function of the high-resolution spectrometer measured by the 157CLS was 0.10pm(FWHM). As a result, the deconvolved FWHM of the ultra-line-narrowed F_2 laser is 0.12pm, the deconvolved spectral purity containing 95% of the total energy (E95) was less than 0.45pm.
机译：半导体制造路线图预测，从2004/2005年起，半导体市场将需要65nm节点器件。因此，在ASET项目“ F_2激光光刻开发项目”下，正在开发用于折光投影系统的超窄线F_2激光器。该项目的目标是实现F_2激光光谱带宽低于0.2pm（FWHM），以5 kHz的重复频率获得25W的平均功率。因此，准确测量激光光谱和激光波长稳定性非常重要。因此，我们开发了带有Br灯的VUV波长计，以测量F_2激光的绝对波长。我们使用157.4840nm和157.6385nm的Br-lamp参考线获得了用于主要F_2激光跃迁的157.631nm，我们还开发了VUV高分辨率光谱仪来测量光谱轮廓，并通过157nm相干光源（157CLS）进行了校准。 157CLS的线宽非常窄，可以通过增量函数近似得出。 157CLS的线宽为0.008pm（半峰全宽，FWHM），功率为0.1mW。 157CLS测量的高分辨率光谱仪的仪器功能为0.10pm（FWHM）。结果，超行收窄的F_2激光器的去卷积半高宽为0.12pm，包含总能量（E95）95％的去卷积光谱纯度小于0.45pm。

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