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首页> 外文会议>Conference on Photomask and Next-Generation Lithography Mask Technology IX, Apr 23-25, 2002, Yokohama, Japan >Template of Specifications for Assist Feature Script Implementation
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Template of Specifications for Assist Feature Script Implementation

机译：辅助功能脚本实现的规范模板

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The benefit of assist feature has been greatly appreciated in the aspect of bringing the process windows of isolated and semi-isolated patterns into together with that of dense patterns; hence a common process window is attainable. The width of assist feature and the distance between assist feature and main pattern are two basic, fundamental specifications from the viewpoint of lithographer. In fact, there exist other specifications that are essential to success of assist feature implementation. For instance, the distance of two adjacent assist features and the gap between ends of assist feature to main patterns are all of necessity in terms of lithographic performance. From the perspective of feasibility and ease of photomask fabrication there are some specifications or/and constraints that should be implemented and enforced. One illustrative example is the extent of assist feature end pullback as two slightly off-axis assist features either joint or separate with a distance smaller than a given minimum space. Recently, the request of multiple assist features has enormously increased. The task of implementing multiple assist features is not trivial at all; the fact is that it introduces many more specifications to be contented. Under most circumstances, the implementation of assist feature involves lithographic engineers, mask-making engineers, and CAD engineers or script implementation engineers; this brings out the importance of communication mechanism that can describe the true intention of each specification. The question is that whether the mechanism is sufficient or not. The goal of the present work is to develop templates of specifications for assist feature implementation. Currently, many conditions and constraints have been identified and collected. One example is the central-edge template, which is allowed to prioritize the "central assist feature" vs. "edge assist feature." It is believed that with the presence of specification templates both CAD and script implementation engineer will have a clear and consistent guideline to achieve the true intention of each specification.
机译：在将隔离和半隔离图案的处理窗口与密集图案的处理窗口整合在一起方面，极大地意识到了辅助功能的好处。因此可以达到一个通用的过程窗口。从光刻者的角度来看，辅助特征的宽度以及辅助特征与主图案之间的距离是两个基本的基本规格。实际上，存在其他一些对成功实现辅助功能至关重要的规范。例如，就光刻性能而言，两个相邻辅助特征的距离以及辅助特征的末端与主图案之间的间隙都是必需的。从光掩模制造的可行性和容易性的角度来看，应该实施和执行一些规范或/和约束。一个说明性示例是辅助特征端部回缩的程度，因为两个稍微偏轴的辅助特征以小于给定最小空间的距离接合或分离。最近，对多种辅助功能的需求已大大增加。实现多种辅助功能的任务绝非易事。事实上，它引入了更多需要满足的规范。在大多数情况下，辅助功能的实现需要光刻工程师，掩膜制作工程师以及CAD工程师或脚本实施工程师来完成。这带出了可以描述每个规范真正意图的通信机制的重要性。问题是该机制是否足够。本工作的目的是开发用于辅助功能实现的规范模板。当前，已经确定并收集了许多条件和约束。一个示例是中央边缘模板，该模板允许优先处理“中央辅助功能”和“边缘辅助功能”。可以相信，有了规范模板，CAD和脚本实施工程师都将拥有清晰一致的准则来实现每个规范的真实意图。

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