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首页> 外文会议>Conference on Photon Processing in Microelectronics and Photonics III; 20040126-20040129; San Jose,CA; US >Laser micro-machining of high density optical structures on large substrates
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Laser micro-machining of high density optical structures on large substrates

机译：大型基板上高密度光学结构的激光微加工

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摘要

A new laser mask projection technique, Synchronised Image Scanning (SIS), has been developed for the efficient fabrication of dense arrays of repeating microstructures on large area substrates. This paper details the technique and provides specific examples of the type of structures that can be produced. SIS allows for major improvements in the accuracy and speed with which 3D patterns can be created over large areas by laser ablation. An add-in for CAD software has been developed to build up linear feature arrays for the mask from 3D designs. Feature sizes down to a few microns can be produced with excellent surface quality. Large arrays of microstructures have wide ranging applications in many areas. One example is the machining of large polymer master panels that are then electroformed to produce a mould for replication for the manufacture of display enhancement films.
机译：已经开发出一种新的激光掩模投影技术，即同步图像扫描（SIS），用于在大面积基板上有效地制造密集的重复微结构阵列。本文详细介绍了该技术，并提供了可以生产的结构类型的具体示例。 SIS可以极大地提高准确性和速度，从而可以通过激光烧蚀在大面积上创建3D图案。已经开发了用于CAD软件的插件，以根据3D设计为掩模构建线性特征阵列。可以以极好的表面质量生产低至几微米的特征尺寸。大量的微结构在许多领域都有广泛的应用。一个示例是对大型聚合物母板进行机加工，然后将其电铸以生产用于复制的模具，以制造显示增强膜。

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