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首页> 外文会议>Conference on Photon Processing in Microelectronics and Photonics III; 20040126-20040129; San Jose,CA; US >Thermal mechanisms of laser micromachining of indium tin oxide
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Thermal mechanisms of laser micromachining of indium tin oxide

机译：铟锡氧化物激光微加工的热机理

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摘要

A critical review of pulsed laser micromachining of Indium Tin Oxide (ITO) films on glass substrates is presented. The thermal mechanisms responsible for ITO micromachining are discussed, including the roles of melting, thermo-capillary flow of molten ITO, and vaporization. The importance of flexible displays now motivates research of ITO on flexible polymer substrates. Experimental results of Nd:YAG micromachining of ITO on PET substrates are presented. The results show distinct differences from the case of glass substrates. Ablated sections have complete ITO removal with little damage to the PET substrate. The edges of the ablated sections have no melt ridge build-up as seen on glass substrates. Results are interpreted in terms of the thermal and mechanical properties of the film and substrate.
机译：提出了对玻璃基板上的氧化铟锡（ITO）薄膜进行脉冲激光微加工的重要综述。讨论了负责ITO微加工的热机制，包括熔化，熔化的ITO的热毛细流动和汽化的作用。柔性显示器的重要性现在激发了在柔性聚合物基板上进行ITO的研究。介绍了Nd：YAG在ITO衬底上进行ITO微细加工的实验结果。结果显示与玻璃基板的情况明显不同。烧蚀的部分可以完全去除ITO，而对PET基材的损坏很小。如在玻璃基板上所见，烧蚀部分的边缘没有熔融脊堆积。根据薄膜和基材的热和机械性能来解释结果。

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