...
  • 主题
高级搜索  >
历史搜索 清空历史
首页> 外文期刊>Journal of Physics, D. Applied Physics: A Europhysics Journal >Laser micromachining of indium tin oxide films on polymer substrates by laser-induced delamination
【24h】

Laser micromachining of indium tin oxide films on polymer substrates by laser-induced delamination

机译：激光诱导分层对聚合物基底上的铟锡氧化物薄膜进行激光微加工

获取原文
获取原文并翻译 | 示例
           
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

A Q-switched neodymium : yttrium -aluminium -garnet (Nd : YAG) laser was used to ablate indium tin oxide (ITO) thin films from polyethylene terephthalate substrates. Film damage and partial removal with no evidence of a melt zone was observed above 1.7 J cm(-2). Above the film removal threshold (3.3 J cm(-2)) the entire film thickness was removed without substrate damage, suggesting that ablation was a result of delamination of the film in the solid phase. Measurements of ablated fragment velocities near the ablation threshold were consistent with calculations of velocities caused by stress-induced delamination of the ITO film, except for a high velocity component at higher fluences. Nanosecond time-resolved shadowgraph photography revealed that the high velocity component was a shock wave induced by the rapid compression of ambient air when the film delaminated.
机译：Q开关钕：钇-铝-石榴石（Nd：YAG）激光器用于从聚对苯二甲酸乙二醇酯基底上烧蚀铟锡氧化物（ITO）薄膜。在1.7 J cm（-2）以上观察到膜损坏和部分去除，没有熔融区的迹象。高于薄膜去除阈值（3.3 J cm（-2）），整个薄膜厚度被去除而不会损坏基材，这表明烧蚀是固相中薄膜分层的结果。靠近烧蚀阈值的烧蚀碎片速度的测量与应力引起的ITO膜分层引起的速度计算一致，除了在较高注量下的高速分量外。纳秒级时间分辨阴影摄影显示，当膜分层时，高速分量是由周围空气的快速压缩引起的冲击波。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号