Surface microfabrication of fused silica glass by UV laser irradiation

机译：紫外激光辐照熔融石英玻璃的表面微加工

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Surface micro-structuring of fused silica glass plates was performed by single-shot irradiation with a single-mode laser beam from a diode-pumped solid state UV laser at 355 nm. Well-defined micropattern without debris and microcrack formations around the etched area was fabricated by laser ablation with a focused laser-beam in the ambient air. The time-resolved optical emission spectra of plume were measured to elucidate the ablation behavior of silica glass induced by nanosecond-pulsed laser irradiation at 355 nm where absorption of silica glass is negligibly small. This method is suitable for rapid prototyping of surface microstructuing without a clean room environment.

机译：熔融石英玻璃板的表面微结构是通过单次照射，采用来自二极管泵浦固态UV激光器的355 nm单模激光束进行的。通过在环境空气中用聚焦激光束进行激光烧蚀来制造清晰的微图案，在蚀刻区域周围没有碎屑和微裂纹。测量烟羽的时间分辨发射光谱，以阐明在355 nm处纳秒脉冲激光辐照引起的石英玻璃的烧蚀行为，其中石英玻璃的吸收很小。此方法适用于没有洁净室环境的表面微结构的快速原型制作。

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来源
《Conference on Photon Processing in Microelectronics and Photonics III; 20040126-20040129; San Jose,CA; US》|2004年|P.112-117|共6页
会议地点 San Jose CA(US)
作者
H. Niino; Y. Kawaguchi; T. Sato; A. Narazaki; X. Ding; R. Kurosaki;
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作者单位

Photoreaction Control Research Center (PCRC), National Institute of Advanced Industrial Science and Technology (AIST) Tsukuba Central 5, Higashi 1-1-1, Tsukuba, Ibaraki 305-8565, Japan;

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原文格式 PDF
正文语种 eng
中图分类光电子技术的应用;物理光学（波动光学）;
关键词
laser ablation; diode-pumped solid state UV laser; single mode laser beam; fused silica glass;

机译：激光烧蚀；二极管泵浦固态紫外激光；单模激光束；熔融石英玻璃;

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专利

1. Laser-Induced Point Defects in Fused Silica Irradiated by UV Laser in Vacuum [J] . Zhou Xiaoyan, Zhou Xinda, Huang Jin, Advances in condensed matter physics . 2014,第Null期

机译：真空中紫外激光辐照熔融石英中的激光诱导点缺陷
2. Laser-Induced Point Defects in Fused Silica Irradiated by UV Laser in Vacuum [J] . XiaoyanZhou, XindaZhou, JinHuang, Advances in condensed matter physics . 2014,第11期

机译：真空中紫外激光辐照熔融石英中的激光诱导点缺陷
3. Laser-induced defects in fused silica by UV laser irradiation [J] . Xu SZ, Yuan XD, Zu XT, Journal of Non-Crystalline Solids: A Journal Devoted to Oxide, Halide, Chalcogenide and Metallic Glasses, Amorphous Semiconductors, Non-Crystalline Films, Glass-Ceramics and Glassy Composites . 2007,第44a46期

机译：紫外激光辐照熔融石英中的激光诱导缺陷
4. Surface microfabrication of fused silica glass by UV laser irradiation [C] . H. Niino, Y. Kawaguchi, T. Sato, Society of Photo-Optical Instrumentation Engineers Conference on Photon Processing in Microelectronics and Photonics . 2004

机译：用UV激光照射熔融石英玻璃的表面微生物
5. UV-laser-induced densification of fused silica: A molecular dynamics study. [D] . Zheng, Lianqing. 2005

机译：紫外激光诱导的熔融石英致密化：分子动力学研究。
6. Resistance of Scratched Fused Silica Surface to UV Laser Induced Damage [O] . Hui Ye, Yaguo Li, Qiao Xu, -1

机译：划痕的熔融石英表面对紫外线激光引起的损坏的抵抗力
7. Laser-Induced Point Defects in Fused Silica Irradiated by UV Laser in Vacuum [O] . Xiaoyan Zhou, Xinda Zhou, Jin Huang, 2014

机译：用UV激光真空照射熔融二氧化硅的激光诱导点缺陷
8. Combined Advanced Finishing and UV-Laser Conditioning for Producing UV Damage Resistant Fused Silica Optics [R] . Menapace, J. A., Penetrante, B., Golini, D., 2001

机译：结合先进的精加工和紫外激光调节，用于生产抗紫外线损伤的熔融石英光学元件

Surface microfabrication of fused silica glass by UV laser irradiation

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