Single pulse microvia drilling of resin-coated copper substrates using an enhanced peak power planar waveguide CO_2 laser

机译：使用增强的峰值功率平面波导CO_2激光器对树脂涂覆的铜基板进行单脉冲微孔钻孔

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CO_2 laser drilling of the resin coated copper (RCC) layers of laminated circuit boards has been investigated at different fluence levels. The threshold fluence for copper layer drilling is found to be 570 Jcm~(-2) for 5 μm and 1500 Jcm~(-2) for 12 μm copper thickness, using laser pulses in the 10 μs and 20 μs FWHM respectively. Undercut in the resin layer is found to primarily depend on the amount of excess energy in the pulse tail. Methods to reduce the pulse decay time have been investigated, giving smaller diameter breakthrough holes close to threshold, which should aid the control of hole drilling in RCC. High-speed videography has been used to verify the observations of post-processing analysis.

机译：已经研究了在不同注量水平下对层压电路板的树脂涂层铜（RCC）层进行的CO_2激光钻孔。发现铜层钻孔的阈值通量分别为10μs和20μsFWHM，对于5μm的铜厚度为570 Jcm〜（-2），对于12μm的铜厚度为1500 Jcm〜（-2）。发现树脂层的底切主要取决于脉冲尾部中多余能量的量。已经研究了减少脉冲衰减时间的方法，使直径较小的穿透孔接近阈值，这将有助于控制RCC中的钻孔。高速摄影已用于验证后处理分析的结果。

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《Conference on Photon Processing in Microelectronics and Photonics III; 20040126-20040129; San Jose,CA; US》|2004年|P.276-283|共8页
会议地点 San Jose CA(US)
作者
C. J. Moorhouse; F. Villarreal; J. J. Wendland; H. J. Baker; D. R. Hall; D. P. Hand;
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作者单位

School of Engineering and Physical Sciences, Heriot Watt University, Edinburgh EH14 4AS, UK;

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原文格式 PDF
正文语种 eng
中图分类光电子技术的应用;物理光学（波动光学）;
关键词
carbon dioxide lasers; drilling; microvia; resin coated copper;

机译：二氧化碳激光器；钻孔；微孔；树脂涂层铜;

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1. High-peak-power pulsed operation of 2.0 μm (AlGaln)(AsSb) quantum-well ridge waveguide diode lasers [J] . M. Eichhorn, M. Rattunde, J. Schmitz, Journal of Applied Physics . 2006,第5期

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2. Efficient multiline nanosecond pulse amplification in planar waveguide CO_2 amplifier for extreme UV laser-produced plasma source [J] . Krzysztof M. Nowak, Takeshi Ohta, Takashi Suganuma, Optics Letters . 2014,第7期

机译：平面波导CO_2放大器中的高效多线纳秒脉冲放大，用于极端UV激光产生的等离子体源
3. Efficient multiline nanosecond pulse amplification in planar waveguide CO_2 amplifier for extreme UV laser-produced plasma source [J] . Krzysztof M. Nowak, Takeshi Ohta, Takashi Suganuma, Optics Letters . 2014,第7期

机译：平面波导CO_2放大器中的高效多线纳秒脉冲放大，用于极端UV激光产生的等离子体源
4. Single pulse microvia drilling of resin-coated copper substrates using an enhanced peak power planar waveguide CO_2 laser [C] . C. J. Moorhouse, F. Villarreal, J. J. Wendland, Society of Photo-Optical Instrumentation Engineers Conference on Photon Processing in Microelectronics and Photonics . 2004

机译：使用增强峰值功率平面波导CO_2激光器的树脂涂覆铜基板的单脉冲微孔钻孔
5. The generation and propagation of sub-picosecond, high-peak-power, laser pulses. [D] . Braun, Alan Michael. 1997

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8. High-power single spatial mode AlGaAs channeled-substrate-planar semiconductor diode lasers for spaceborne communications [R] . Connolly, J. C., Carlin, D. B., Ettenberg, M. 1989

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Single pulse microvia drilling of resin-coated copper substrates using an enhanced peak power planar waveguide CO_2 laser

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