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首页> 外文会议>Conference on Photon Processing in Microelectronics and Photonics III; 20040126-20040129; San Jose,CA; US >3D patterning method in femtosecond laser microprocessing using diffractive optical elements
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3D patterning method in femtosecond laser microprocessing using diffractive optical elements

机译：飞秒激光微加工中使用衍射光学元件的3D图案化方法

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摘要

We demonstrated a simple chromatic dispersion reduction method of 3-dimensional (3D) patterning of femtosecond pulses using a multi-level phase type diffractive optical element (DOE) and a focusing objective lens. Our method increases flexibility of femtosecond laser microprocessing. With appropriate focal length of the DOE and distance between the DOE and the focusing lens, large chromatic dispersion of the DOE resulting from spectral bandwidth of a femtosecond pulse can be reduced, and 3D focusing pattern of femtosecond pulse can be obtained not only controlled in focal plane but also in focal depth. The method was verified through optical and processing experiments with laser pulses of 400 fs duration and of 40 nm bandwidth. The focal length of the DOE and the objective lens was 1600 mm and 10 mm, respectively. Partially periodical structure of focusing points was formed at designed position and its focal depth were much smaller than that focused with only the DOE. By irradiating the constructed beam, microstructure was formed precisely inside SiO_2 glass. The processed points are clearly separated each other with a separation of 5 μm and the spot sizes were almost same as those irradiated without the DOE.
机译：我们演示了一种使用多级相位型衍射光学元件（DOE）和聚焦物镜对飞秒脉冲进行3维（3D）图案化的简单色散降低方法。我们的方法提高了飞秒激光微处理的灵活性。借助适当的DOE焦距和DOE与聚焦透镜之间的距离，可以减少由飞秒脉冲的光谱带宽导致的DOE的大色散，并且不仅可以控制焦距，还可以获得飞秒脉冲的3D聚焦模式平面，而且在焦深。通过光学和加工实验，以400 fs的持续时间和40 nm带宽的激光脉冲验证了该方法。 DOE和物镜的焦距分别为1600 mm和10 mm。在设计位置形成了焦点的局部周期性结构，其焦点深度比仅使用DOE的焦点深度小得多。通过照射构造的光束，在SiO_2玻璃内部精确地形成了微结构。加工后的点彼此明显分开，间距为5μm，并且光斑大小几乎与未使用DOE照射的光斑大小相同。

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