首页> 外国专利> METHOD FOR MANUFACTURING DIFFRACTION OPTICAL ELEMENT, AND DIE FOR MANUFACTURE OF DIFFRACTION OPTICAL ELEMENT AND DIFFRACTION OPTICAL ELEMENT MANUFACTURED BY THE METHOD FOR MANUFACTURING DIFFRACTION OPTICAL ELEMENT, AND OPTICAL SYSTEM, OPTICAL APPLIANCE AND ALIGNER HAVING THE DIFFRACTION OPTICAL ELEMENT, METHOD FOR MANUFACTURING DEVICE, AND DEVICE

METHOD FOR MANUFACTURING DIFFRACTION OPTICAL ELEMENT, AND DIE FOR MANUFACTURE OF DIFFRACTION OPTICAL ELEMENT AND DIFFRACTION OPTICAL ELEMENT MANUFACTURED BY THE METHOD FOR MANUFACTURING DIFFRACTION OPTICAL ELEMENT, AND OPTICAL SYSTEM, OPTICAL APPLIANCE AND ALIGNER HAVING THE DIFFRACTION OPTICAL ELEMENT, METHOD FOR MANUFACTURING DEVICE, AND DEVICE

机译：制备衍射光学元件的方法，以及用于制造衍射光学元件的模具，以及由制造衍射光学元件的方法和光学系统制造的衍射光学元件，以及应用该衍射方法的光学装置和装置，

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摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a diffraction optical element which the diffraction optical element with high accuracy can be formed and stably manufactured at a low cost in a short time, and to provide a die for manufacturing the diffraction optical element and the diffraction optical element which are manufactured by the method, an optical system having the diffraction optical element and so on.;SOLUTION: In this method for forming the diffraction optical element by transferring a mask pattern to a work, the vertical form of the diffraction optical element is formed by using a first mask and the slope part of the diffraction optical element is formed by using a second mask in the working region defined by the first mask.;COPYRIGHT: (C)2002,JPO

机译：解决的问题：提供一种用于制造衍射光学元件的方法，该方法可以在短时间内以低成本低成本地稳定地制造高精度的衍射光学元件，并且提供一种用于制造衍射光学元件的模具。解决方案：在该方法中，通过将掩模图案转移到工件上来形成衍射光学元件，该方法是将衍射图案的垂直形式转移到工件上，从而形成衍射光学元件。光学元件是通过使用第一掩模形成的，而衍射光学元件的倾斜部分是通过使用第二掩模在由第一掩模限定的工作区域中形成的。版权所有：（C）2002，JPO

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公开/公告号JP2002189112A

专利类型
公开/公告日2002-07-05

原文格式PDF
申请/专利权人 CANON INC;
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申请/专利号JP20000389978
发明设计人 OGUSU MAKOTO;IWASAKI YUICHI;
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申请日2000-12-22
分类号G02B5/18;G03F1/08;G03F7/20;H01L21/027;
国家 JP
入库时间 2022-08-22 00:55:02

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