首页> 外国专利> DIFFRACTION OPTICAL ELEMENT, OPTICAL SYSTEM EQUIPPED WITH DIFFRACTION OPTICAL ELEMENT, MANUFACTURE OF DIFFRACTION OPTICAL ELEMENT, EXPOSURE DEVICE INCLUDING OPTICAL SYSTEM EQUIPPED WITH DIFFRACTION OPTICAL ELEMENT AND MANUFACTURE OF DEVICE BY USING EXPOSURE DEVICE

DIFFRACTION OPTICAL ELEMENT, OPTICAL SYSTEM EQUIPPED WITH DIFFRACTION OPTICAL ELEMENT, MANUFACTURE OF DIFFRACTION OPTICAL ELEMENT, EXPOSURE DEVICE INCLUDING OPTICAL SYSTEM EQUIPPED WITH DIFFRACTION OPTICAL ELEMENT AND MANUFACTURE OF DEVICE BY USING EXPOSURE DEVICE

机译：衍射光学元件，配备有衍射光学元件的光学系统，衍射光学元件的制造，曝光设备（包括配备有衍射光学元件的光学系统）和通过使用曝光设备制造的设备

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摘要

PROBLEM TO BE SOLVED: To provide a diffraction optical element having high optical performance, capable of realizing, easily and surely, an optical function equivalent to a high-precision optical element requiring an extreme minute pattern, and capable of suppressing generation of unnecessary diffracted light or stray light. ;SOLUTION: Optical elements 31, 32 are joined and fixed by positioning so as to be contacted on diffraction patterns 31b, 32b, and this diffraction optical element 21 is composed by the weight function of both diffraction patterns 31b, 32b, so as to be substantially equivalent to a diffraction optical element equipped with an eight-step pattern, by paying attention to the optical path length of a ray passing through the parts of each step composing the diffraction patterns.;COPYRIGHT: (C)2000,JPO

机译：解决的问题：提供一种具有高光学性能的衍射光学元件，其能够容易且可靠地实现与需要极细微图案的高精度光学元件等效的光学功能，并且能够抑制不必要的衍射光的产生。或杂散光。 ;解决方案：光学元件31、32通过定位连接并固定，以使其与衍射图样31b，32b接触，并且该衍射光学元件21由两个衍射图样31b，32b的权重函数构成，从而成为通过注意穿过组成衍射图样的每一步部分的光线的光路长度，基本上等同于配备有八步图样的衍射光学元件。;版权所有：（C）2000，JPO

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公开/公告号JP2000206321A

专利类型
公开/公告日2000-07-28

原文格式PDF
申请/专利权人 CANON INC;
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申请/专利号JP19990010987
发明设计人 ISHII HIROYUKI;
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申请日1999-01-19
分类号G02B5/18;G03F7/22;G03H1/08;H01L21/027;
国家 JP
入库时间 2022-08-22 02:01:15

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