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首页> 外文会议>Conference on Photon Processing in Microelectronics and Photonics Jan 21-24, 2002 San Jose, USA >Effects of laser parameters on plume characteristics and ablation rate
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Effects of laser parameters on plume characteristics and ablation rate

机译：激光参数对烟羽特性和烧蚀率的影响

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摘要

Laser ablation of polyimide and polycarbonate by 3rd harmonic Nd-YAG laser is studied using secondary ion mass spectrometry (SIMS) and confocal microscopy. The ablated debris' were collected on an H-terminated Si substrate and then analysed using SIMS. Mass resolved images of collected debris showed near-hemispherical distribution of hydrocarbon, nitrogen containing and oxygen containing compounds with radius up to 0.7 mm. Ablation in different gases (air, N_2, He) revealed that the nitrogen and oxygen containing compounds are formed because of a reaction of the hot plume with air in the course of thermal dissociation of O_2 and oxygen-assisted dissociation of N_2. The shape and size of the microvia were measured using confocal microscopy through a polished edge of the polymer target. The via drilled in pulse-by-pulse ablation (PBPA) was found to be deeper than that drilled in continuous ablation (CA) with the same number of pulses. This is due to shading of the laser light by the plume from the preceding pulse. In result, explosive boiling occurs during PBPA, while normal vaporisation dominates during CA. Several mechanisms of etching of side walls are discussed.
机译：利用二次离子质谱（SIMS）和共聚焦显微镜研究了三次谐波Nd-YAG激光对聚酰亚胺和聚碳酸酯的激光烧蚀。烧蚀的碎片收集在H端接的Si基板上，然后使用SIMS分析。收集到的碎片的质量分辨图像显示半径最大为0.7 mm的碳氢化合物，含氮和含氧化合物的近半球形分布。不同气体（空气，N_2，He）中的烧蚀表明，在O_2的热离解和N_2的氧辅助离解过程中，热羽流与空气的反应形成了含氮和氧的化合物。使用共聚焦显微镜通过聚合物靶材的抛光边缘测量微孔的形状和尺寸。发现在相同数量的脉冲下，逐脉冲烧蚀（PBPA）钻的通孔比连续烧蚀（CA）钻的通孔更深。这是由于来自前一个脉冲的羽流遮蔽了激光。结果，在PBPA期间发生爆炸沸腾，而在CA期间则以正常蒸发为主。讨论了蚀刻侧壁的几种机理。

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