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首页> 外文会议>Conference on Photon Processing in Microelectronics and Photonics Jan 21-24, 2002 San Jose, USA >PRODUCTION OF INNOVATIVE GEOMETRIES WITH UV LASERS
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PRODUCTION OF INNOVATIVE GEOMETRIES WITH UV LASERS

机译：用紫外线激光生产创新几何

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摘要

Excimer lasers are proven tools to machine 5/2-D microstructures with variable lateral dimensions. Therefore developed techniques are limited in the vertical dimension since material is removed along the optical axis perpendicular to the target plane. This paper presents 3-D structures produced with such UV-lasers. In contrast to optical set-ups for machining 5/2-D structures, this approach tilts the target plane and ablates material underneath the target superficies. The tilting angle adds two major difficulties to laser machining: the distortion of the image on the target and the alteration of the ablation cross section. These two difficulties were studied in experiments with different tilting angles β_L between target plane and optical axis of the laser. The impact of β_L was identified on the achieved geometry of 3-D structures. A first theoretical approximation integrates the material reflectance and the target cross-section in order to give an estimation of the influence of further effects within the ablation process. This theoretical analysis is a starting point for producing undercutting structures and can additionally be applied to changeable shaped surfaces. Such complex 3-D structures have the potential to be used in micro-tribology as well as in micro guidance systems and are estimated being an important step in micro-mechanics.
机译：准分子激光器是行之有效的工具，用于加工横向尺寸可变的5 / 2-D微结构。因此，由于沿垂直于目标平面的光轴去除了材料，因此开发的技术在垂直方向上受到了限制。本文介绍了用此类紫外激光产生的3-D结构。与用于加工5 / 2-D结构的光学装置相反，此方法使目标平面倾斜并烧蚀目标表面以下的材料。倾斜角给激光加工增加了两个主要困难：目标上图像的畸变和烧蚀横截面的改变。这两个困难是在目标平面和激光光轴之间具有不同倾斜角β_L的实验中研究的。确定了β_L对实现的3D结构几何形状的影响。第一理论近似将材料反射率和目标横截面积分，以便给出对消融过程中其他效应影响的估计。该理论分析是生产底切结构的起点，并且可以附加地应用于可变形状的表面。这种复杂的3D结构具有在微摩擦学以及微制导系统中使用的潜力，并且被认为是微力学中的重要一步。

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