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首页> 外文会议>Conference on Photon Processing in Microelectronics and Photonics Jan 21-24, 2002 San Jose, USA >Ultra-fast laser-induced processing of materials: fundamentals and applications in micromachining
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Ultra-fast laser-induced processing of materials: fundamentals and applications in micromachining

机译：超快激光诱导的材料加工：微加工的基本原理和应用

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摘要

Fundamental questions arise regarding the possibility and nature of melting and the ensuing mechanism of ablation in femtosecond laser processing of materials. A comprehensive experimental study is presented to address these issues in depth and detail. The mechanisms of ultra-fast (femtosecond) laser-induced phase-transformations during the laser interactions with materials have been investigated by time-resolved pump-and-probe imaging in both vacuum and ambient environment. The temporal delay between the pump and probe pulses is set by a precision translation stage up to about 500 ps and then extended to the nanosecond regime by an optical fiber assembly. Ejection of material in the form of nanoparticles is observed at several picoseconds after the main (pump) pulse. The ignition of surface-initiated plasma into the ambient air immediately following the pump pulse and the ejection of ablated material in the picosecond and nanosecond time scales have been probed by high-resolution, ultra-fast shadowgraphy. To further dissect the origin and evolution of the ablation process, a double pulse experiment has been implemented, whereby both the pump and probe pulses are split into two components each separated by variable temporal delays. A diffractive optical element is used to fabricate micro-channels in silicon wafers.
机译：有关飞秒激光材料加工中熔化的可能性和性质以及随之产生的烧蚀机理，出现了根本性的问题。提出了一项全面的实验研究，以深入和详细地解决这些问题。通过在真空和周围环境中的时间分辨泵浦和探针成像，研究了激光与材料相互作用期间超快速（飞秒）激光诱导的相变机理。泵浦脉冲和探针脉冲之间的时间延迟由高达约500 ps的精密转换级设置，然后通过光纤组件扩展到纳秒级。在主（泵）脉冲后数皮秒内观察到以纳米颗粒形式出现的材料喷射。高分辨率，超快速的阴影照相法已经探测到在泵浦脉冲之后立即将表面引发的等离子体点燃到环境空气中，并在皮秒和纳秒级的时间范围内喷出烧蚀的材料。为了进一步剖析消融过程的起源和发展，已经实施了双脉冲实验，通过该实验，泵浦脉冲和探测脉冲都被分为两个分量，每个分量均由可变的时间延迟分开。衍射光学元件用于制造硅晶片中的微通道。

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