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首页> 外文会议>Conference on Reliability, Testing, and Characterization of MEMS/MOEMS Oct 22-24, 2001, San Francisco, USA >Design and Fabrication of MEMS-Based Micropropulsion Devices at JPL
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Design and Fabrication of MEMS-Based Micropropulsion Devices at JPL

机译：JPL的基于MEMS的微推进装置的设计和制造

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摘要

The development and fabrication of microfabricated propulsion components at the Jet Propulsion Laboratory (JPL) is reviewed. These include a vaporizing liquid micro-thruster (VLM), which vaporizes propellant to produce thrust. Thrust performances of 32 μN for an input power of 0.8 W were measured. Miniature solenoid and latch valves are being developed by Moog, Inc. in collaboration with JPL. Although metal-based, these valves employ batch fabrication approaches in their design. A valve prototype 1 cm~3 in size and weighing 7 gram was recently manufactured by Moog. This valve has a power requirement (holding power) of 0.7 W, a 5-V operating voltage, and response times of 1.5 ms (open) and 0.5 ms (close). In a lifetest at Moog this valve reached 1,000,000 cycles. A piezoelectrically actuated microvalve is being developed at JPL. The device is still in early development, however, initial testing showed leak rates as low as 0.001 sccm N_2 at pressures between 10-100 psig. A micro-isolation valve being developed at JPL is aimed at isolating propulsion systems prior to their use. This one-time opening valve can be actuated with 0.01 J within 0.1 ms. This valve, fabricated entirely from silicon and Pyrex, reaches burst pressures as high as 3,000 psia.
机译：审查了喷气推进实验室（JPL）的微型推进组件的开发和制造。其中包括汽化液微推力器（VLM），它使推进剂汽化以产生推力。对于0.8 W的输入功率，测得的推力性能为32μN。 Moog，Inc.与JPL合作开发了微型电磁阀和自锁阀。尽管这些阀门是基于金属的，但它们在设计中采用了批量制造的方法。 Moog最近制造了尺寸为1 cm〜3且重7克的阀门原型。该阀的功率要求（保持功率）为0.7 W，工作电压为5 V，响应时间为1.5 ms（打开）和0.5 ms（关闭）。在穆格（Moog）进行的寿命测试中，该阀门达到了1,000,000次循环。 JPL正在开发一种压电驱动的微型阀。该设备仍处于早期开发阶段，但是，初步测试显示，在10-100 psig之间的压力下，泄漏率低至0.001 sccm N_2。 JPL开发的微隔离阀旨在在使用前隔离推进系统。一次性开启阀可在0.01 ms内以0.01 J促动。该阀完全由硅和派热克斯制成，可承受高达3,000 psia的爆破压力。

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